2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS
2.3 INSTALLATION
REQUIREMENTS
Dimensions and Weight
Height (mm)
Width
(mm)
Depth
(mm)
Mass
(kg)
Main unit
1,150
710 710 250
Operation unit
730
1,450 (monitor included)
570 710 80
Air compressor
530 290
in
diameter
17
Installation Room
•
Room temperature:
20
℃
±
5
℃
•
Humidity:
60% or less
•
Acoustic vibration:
50 dB or less (A mode)
•
Floor vibration:
5 µm (5 Hz) or less
Power Supply
•
Capacity:
Single-phase AC100 V, 50/60 Hz, 1.5 kVA (one
receptacle with a grounding terminal)
When an optional evacuation system is installed, 1.5
kVA
×
2 (2 receptacles with grounding terminals)
•
Fluctuation:
±
10% or less
•
Grounding terminal:
100 ohms or less
•
Cable length
Main unit:
2.5 m
High-vacuum evacuation system and evacuation system:
2.5 m
CAUTION
Do not install this instrument in a place where any fluorescent lamps
directly illuminate the SPM head. Fluorescent lamps blink at 100 Hz (if
the line frequency is 50 Hz) or at 120 Hz (if the line frequency is 60 Hz)
and this noise may appear on the displayed image. Concerning the
installation and layout plan, please consult your local JEOL service
personnel.
TMPM5200-2
2-5
