5-38
TMPM5200-2
eters
Liftin
■
Setting scanning param
Before you carry out an approach, set the scanning parameters required for observation
using the MFM tab window. Although these parameters differ depending upon the
specimen and the purpose of observation, you can usually set the parameters as follows:
g
Click on the radio button that corresponds to the desired lift mode.
The standard is the point by point lift mode. The optional line by line lift mode
can be used by incorporating the DSP MFM board into the controller.
Scan Size
Click on the Scan Size selection box in t
window. When the
numerical value is highlighted, enter 5.000 (5 um) using the keyboard and
lize the input. Or, click on the
he MFM tab
pressing the Tab key to fina
button in the
select a numerical value near 5 000 nm.
Clock/ms
Click on the
Scan Size selection box and
The maximum scanning range depends on the scanner installed. In actual practice,
the scanning area should be changed to the region you want to observe.
button in the Clock/ms selection box and select 1.67 ms.
This is the parameter that determines the scan speed. Naturally, this parameter
should be changed according to the observation area and the unevenness of the
specimen surface.
Filter/Hz
Click on the
button in the Filter/Hz selection box and select 1.0 from the
pull-down menu.
Filter/Hz is the parameter that determines the response speed of the feedback circuit.
The larger the set value is, the faster the response speed becomes, thus producing a
sharp image, but the feedback circuit easily oscillates. Usually, set the highest speed
at which the feedback circuit does not oscillate while watching the image during
scanning.
