5-62
TMPM5200-2
4.
E
nput box and 600 in the Low Pass
F
5.
Click
6.
Specify Start Frequency/KHz and Stop Frequency/KHz in the Peak Search
f
n the characteristic frequency of the
7.
Click
ndow.
The
ibration amplitude created by
force
disp
You can ch
specify the
value obtain
forced frequ
Adjustment o
In the case of image observation by the FM
characteristi
ntilever
directly to the following
opera
1.
S
2.
C
nter 10 in the High Pass Filter/KHz i
ilter/KHz input box.
on the Normal Scan radio button.
rame.
A span of about 100 kHz centering o
cantilever is an appropriate range to input.
on the Scan button in the FM tab wi
frequency-dependence curve of cantilever v
d oscillation will be displayed, and the peak frequency and Q factor will be
layed.
eck the cantilever resonance frequency for the FM detection method and
center frequency for the FM detection method, using the curve and the peak
ed through the operations explained above. Moreover, you can determine the
ency for the FMD mode.
f Positive Feedback Oscillation (FM Detection Method)
detection method, if you already know the
c frequency of the cantilever, you can omit the above operation, “Ca
characteristic frequency peak search” and can proceed
tion:
elect RMS from AFM ALIGNMENT on the AFM AMP unit.
lick on the
button in the STM/AFM selection box in the Scan frame on
t
3.
Cl
to
FM
w.
4.
S
ch
5.
Sp
op Gain according to measurement condi-
tions.
n surfaced specimen, select Range 3 or Range 4 for
for Loop Gain. When measuring
a not so uneven surfaced specimen, select Range 1 or Range 2 for Dynamic Range,
number from 10 to 30 for Loop Gain.
he Advanced tab window; then select FM from the pull-down menu.
ick on the Cantilever button at the lower right in the Advanced tab window
open the Cantilever Tuning window; then click on the FM tab to open the
windo
pecify High Pass Filter/KHz and Low Pass Filter/KHz according to the
aracteristic frequency of the cantilever.
If you set High Pass Filter to 10 kHz and Low Pass Filter to 600 kHz, there will
be no inconvenience in routine measurement.
ecify Dynamic Range and Lo
When measuring a very uneve
Dynamic Range, and select a number from 2 to 10
and select a
Frequency Dynamic Range
Optimum Loop Gain
Range 1
76 Hz
20, 30
Range 2
152 Hz
10, 20
Range 3
305 Hz
5, 10
Range 4
610 Hz
2, 5