５
MEASUREMENT OPERATION
■
Operation buttons
5-196
TMPM5200-2
Sca
der this
These are operation buttons concerning SPM measurement. They change depending on
the SPM mode or instrument model.
n/Abort
Click on this button when you start measurement. When measurement starts, the
indication on the button changes to Abort. When you click on the button again un
condition, measurement stops.
Indication while measurement Indication while measurement
stops
is progressing
at measurement data is not
Grab/Canc
recorded after completing th
reco
again under this state, the reserved recording is canceled (canceled reserved recording
state, the measurement continues to repeat
unle
measurement.
This button appears gray while the tip is retracted.
If you stop measurement using this button, be careful th
recorded.
el Grab
If you click on this button after starting measurement, the current measurement data is
e measurement (reserved recording state). In the reserved
rding state, the indication on the button changes to Cancel Grab. When you click
state). In the canceled reserved recording
ss you stop the
Indication at canceled reserved Indication at reserved
recording
state
recording
state
This button appears gray while the measurement is not started.
Auto
cquire one image in the JSPM
−
5200/JSPM
−
5700, you can prevent yourself
from forgetting to record the measurement data when you carry out measurement with
this check box checked.
When you want to measure continuously, as when searching the optimal values of the
measurement parameters or waiting until the creep and thermal drift ceases in the
scanner, carry out the measurement leaving this check box unchecked.
This button also remains gray if the Auto record is not checked.
Grab
While this checkbox is checked, the measurement data is recorded without fail after
measurement (always measure under the reserved recording state). Since it takes a fairly
long time to a
You cannot change the checkbox during measurement.
