５
MEASUREMENT OPERATION
TMPM5200-2
5-151
f the active window in which the image is
cantilever position (“+”); then drag the “+” mark, while
holding down the left mouse button, to the point where you want to perform
I-V measurement.
The cursor is in effect only inside o
surrounded by a green line. The image surrounded by a red line is not active now. If
you acquire the current image according to “Current Image Observation”, the image
will be grabbed later and becomes an active window.
5.
Move the cursor to the
Topography
Measurement
position
The cantilever is actually moving in real time during the cursor dragging, so be sure
to drag the “
+
” mark slowly.
6.
After placing the “+” mark at the measurement point, press the right mouse
button to finalize the position.
The Tip window will be displayed.
7.
Deselect Tip Retract.
8.
Click on the SPS button.
The SPS Parameters window will appear.
9.
Click on the IV tab.
10.
Specify the parameters for I-V measurement according to the following
procedure.
a.
Specify the voltage at which to measure I-V.
Here, assume that the I-V measurement range is to
m –1.0
+1.0 V.
Enter –1.000 in Low Voltage/V and 1.000 in the High Voltage/V input box using
the keyboard.
This system executes capac
compensation in such a way that when the
input voltage is 0 V, the current is 0 nA. Therefore, specify the Low and High
Voltages so that they encompass 0 V.
be fro
V to
itance
