5.2 STARTING THE SCAN (MEASUREMENT ) MODE
WinSPM has two modes, a scan mode and a process mode, which function independ-
ently of each other. Here, operation of the scan mode is explained.
5.2.1 Selecting SPM Operation Mode
The operation control window differs depending on the SPM operation mode selected
from the dialog box that opens when the system starts.
The functions of the radio buttons in the dialog box are detailed below:
AC AFM
AFM measurements are possible in AC (slope), phase, or frequency detection mode.
In SPM measurement, you can perform the following measurements:
Shape measurement
SPS (Scanning probe spectroscopy) measurement
SPS mapping measurement
MFM (Magnetic forth microscope) measurement
Viscoelasticity measurement
Kelvin probe measurement.
The optional lock-in amplifier is needed for viscoelasticity and Kelvin probe
measurement.
Contact AFM
In this mode, you can perform the following measurements:
Shape measurement
SPS (Scanning probe spectroscopy) measurement
SPS mapping measurement
MFM (Magnetic forth microscope) measurement
Viscoelasticity measurement
Lateral modulation friction force microscopy measurement
Electrostatic force microscopy measurement.
TMPM5200-2
5-7