5-64
TMPM5200-2
Approac
Move the cantilever closer to the specimen until the RMS
v
alue becomes the voltage
specified in Reference/V. The cantilever movement automatically stops when the RMS
value reaches the Reference/V voltage. The following is the procedure used for this
approach.
1.
Click on the Probe button in the Advanced tab window.
The Tip window will appear.
h
■
2.
Specify each parameter according to the following procedure:
a.
Double-click on the Reference/V input box. When the value in the box is
highlighted, enter the desired value using the keyboard. Press the Tab key
on the keyboard to finalize the value.
Set Reference/V to a figure close to 70% of the RMS value in the AC feedback
mode. Subtract a value of 0.2 from the FMD value in FMD feedback mode.
b.
Click on the
button in the Feedback Filter/Hz selection box; then select
2.0 from the pull-down menu.
of the feedback circuit, which
determined. To prevent the cantilever from
colliding with the specimen, set Feedback Filter/Hz to a value higher than that for
image observation.
c.
Click on Tip Retract to d
3.
Before performing an approach, make sure that the voltage applied to the Z
scanner is at the maximum (+150 V - 200 V).
If the voltage applied to the Z scanner does not reach +150 V, it is judged that the
approach has already been completed. So, the approach will not start even if you
click on the Approach On button in the Tip window.
Now, the Reference/V voltage and the response speed
are used for approach, have been
eselect it.
