JEOL JSPM-5200, Инструкция по эксплуатации

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APPENDIX
7-16 TMPM5200-2
Nanosensor
Mode
Part
name
Thick
ness
(
µ
m)
Width
(
µ
m)
Length
(
µ
m)
Spring
constant
(N/m)
Reso-
nance
frequency
(kHz)
Tip
diame-
ter (nm)
Contact mode CONT 1 − 3 23 − 28 450 0.2 13 15
Guaran-
teed
value
Contact mode CONTR 1 − 3 23 − 28 450 0.2 13 15
AC mode
(High frequency)
NCH 3
−
5 23
−
38 125 42 330 15
AC mode
(High frequency)
NCHR 3 − 5 23 − 38 125 42 330 15
AC mode
(Low frequency)
NCL 6 − 8 30 − 45 225 48 190 15
AC mode
(Low frequency)
NCLR 6
−
8 30
−
45 225 48 190 15
* Material is N-type silicon single-crystal. Resistivity is 0.01 to 0.025
Ω
cm.
* An "R" at the end of the part name indicates an aluminum-coated (on the back) item. The thickness of the
coating is about 30 nm.
* Number of cantilevers in one package is 16, 50 or 385.
* The nominal value of the tip diameter is 10 nm.
Mode
Part
name
Thick
-ness
(
µ
m)
Width
(
µ
m)
Length
(
µ
m)
Spring
constant
(N/m)
Reso-
nance
frequency
(kHz)
Tip
diame-
ter (nm)
Magnet mode MFMR 2 − 4 20 − 35 225 2.8 75 15
(Before
being
coated)
* Magnetic coating: Co-Cr-Ta/Random/50 nm thick
Part name
Thick-
ness
(
µ
m)
Width
(
µ
m)
Length
(
µ
m)
Spring
constant
(N/m)
Resonance
frequency
(kHz)
EFM sensor 1 2 − 4 20 − 35 225 28 75
SUPER SHARP sensor
SSS-NCH
SSS-SEIH 2
3
−
5
4 − 6
23
−
38
30 − 35
125
225
42
15
330
130
HIGH ASPECT
RATIO sensor 3
3 − 5 23 − 38 125 42 330
DIAMOND coat sensor 4 2 − 4 20 − 35 225 28 75
1
Cr (1st layer) and PtIr
5
(2nd layer) coated conductive sensor
2
A sharp sensor with a tip radius of 2 nm (typical)
3
Suitable for measurement of sidewalls with an aspect ratio of 1:7 (typical)
4
A hard diamond-coated sensor with a resistivity of 0.1 to 0.2
Ω
cm