2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS
2-2
TMPM5200-2
2.2 COMPOSITION
SPM Base Unit
•
Coarse movement:
Z coarse-movement distance:
Manually operated up to 5 mm (motor approach in-
cluded)
Approach function:
Motor approach up to 1.5 mm
X, Y coarse movement function:
Manually operated up to
±
3 mm
•
Stage:
Drift-free stage
•
Ports:
Gas introduction and exhaust port (1 each)
Exclusive-only port (1)
Utility ports (2)
Port for cooling option (1)
SPM Head
•
Scanning method:
Specimen scanning
•
Scanner:
Tube-type scanner (replaceable)
X, Y = 10 µm, Z = 3 µm (one standard scanner provided
as standard)
•
Detection method:
Light lever
Laser-beam source:
Class-2 semiconductor laser beam (red)
Laser detector:
Four-segment photodiode
•
Cantilever holder:
Holder used in common for contact mode and AC mode
Cantilever mounting method:
One-touch push-in
Current detection terminal: Built-in
Mounting method:
Slide-in
•
Tip holder
Tip:
0.3 mm diameter
Tip mounting method:
Push-in knock-on
Holder mounting method: Slide-in
Vibration Isolation System
•
Air suspension:
Gimbals piston type, automatic leveling
•
Gel damper:
Built-in
•
Air compressor:
Included as standard
Console Box
•
Rack
Controller housing rack and operation table:
Included as standard
•
Power:
Single-phase AC100 V, 50/60 Hz, 1.5 kVA (one
receptacle with a grounding terminal)
•
Power cable:
2.5 m to basic unit
