5-102
TMPM5200-2
5.5.5 Adva
The Advanced tab window is used for setting details for contact AFM mode. You can set
details and you have to fill in all parameters in the tab window.
nced
Tab
Advanced tab window
■
Checking b
Befo
ration procedure in Sect. 5.3,
“Preparing Approach” is completed using the following items.
•
Ha
ca
•
Is th
Setting par
Here,
the procedure to set parameters for shape measurement. Specify each
param
1.
Cl
efore approaching
re performing approaching, confirm whether the prepa
s
istance between the
ntilever tip and the specimen surface is 0.3 mm or less?
e Z stage position in the approaching-possible range?
e AFM value of the AFM amplifier unit about –2.0 V?
coarse approaching been executed in such a way that the d
•
Is th
•
Is the FFM value of the AFM amplifier unit about 0 V?
After checking these points, set the indicator selection knob on the AFM
amplifier unit to AFM.
■
ameters
we discuss
eter in the Advanced tab window according to the following procedure.
ick on the
button in the Acquisition selection box and select 512
×
512
m the pull-down menu.
ick on the
fro
2.
Cl
button in the Clock/ms selection box and select 100.00 us
rom the pull-down menu.
his is the parameter that determines the scan
f
specimen. Here, set it to 100.00 us provisionally.
T
speed. Naturally, this parameter
should be changed according to the observation area and the unevenness of the