JEOL JSPM-5200, Инструкция по эксплуатации

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APPENDIX
7-28 TMPM5200-2
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Structure to record the piezoelectric-element sensitivity: CalibType
Type Size Note
float 4 bytes Dummy data
float 4 bytes Dummy data
float 4 bytes Dummy data
float 4 bytes Dummy data
float 4 bytes Proximity coefficient Z term
float 4 bytes Dummy data
float 4 bytes Dummy data
float 4 bytes Dummy data
float 4 bytes Dummy data
float 4 bytes Reference Voltage [V]
short 2 bytes Stage
•
Structure to record the detailed SPM parameters: SPMParamType
Type Size Note
float 4 bytes Clock [ms]
float 4 bytes Measurement rotation angle [
°
]
float 4 bytes Feedback filter [Hz]
float 4 bytes Present filter [kHz]
float 4 bytes Head amp gain [V/nA]
short 2 bytes Loop gain (1 to 4)
float 4 bytes X offset [nm]
float 4 bytes Y offset [nm]
float 4 bytes Z gain
float 4 bytes Z offset [V]
float 4 bytes O gain
float 4 bytes O offset [V]
float 4 bytes Back scan bias [V]
enum mode type 4 bytes Measurement mode
（
Table 4
）
short 2 bytes Dummy data