５
MEASUREMENT OPERATION
■
Stage
This opens the stage control window for controlling the coarse motor drive.
Direction
Y-Le
Y-Ri
Y-Off:
Y-U
Y-D
Y-Off:
Z-In:
Specimen surface approaches the tip.
Z-Out:
Specimen surface moves away from the tip.
Z-Off:
Specimen stage does not move.
There is a play of about 3/10 turns due to the rotation-shaft detaching mechanism
when you change the moving direction.
—— CAUTION ———————
When you move the tip close to the specimen using the Coarse Stage
window, the tip never stops even if a tunneling current or atomic force
is actually detected.
ft:
ght:
p:
Do not use JSPM-5200
own:
TMPM5200-2
5-227
