５
MEASUREMENT OPERATION
5-172
TMPM5200-2
■
bration
:
Scanner Cali
A tube-shaped piezoelectric scanner is used in ultra-high vacuum SPM. Generally, the
piezoelectric element of such a type shows a nonlinear dependence on displacement
against voltage in scanning as shown below
Displacement
Voltage
n-compensation unit is installed so that nonlinear
Specify the parameters for compensation and the values for displacement range
comp
shipm
•
Sc
The Scanner Calibration window allows you to save up to six sets of parameters
tion so that you can use multiple scanners. Choose the
own
lication window will be
changed, and the name given to the set of parameters will appear.
•
Enable Compensation
When this check box is checked, the distortion compensation to the XY scanner will
function. However, even if this is not checked, calibration of the scanning range
will work.
•
Changing Compensation Parameter
Only a user with administrator privilege can change the compensation parameter.
A floppy disk, which has recorded the calibration data for each scanner, is attached
to the instrument at its shipment from the factory. You can read the calibration data
from the floppy disk by clicking on the Load Setting button.
In the SPM controller, the distortio
displacement can be removed.
ensation in scanning. These corrections have been made in the factory before
ent.
anner
specified for a scanner calibra
desired set of parameters by clicking on the desired number in the pull-d
number list.
When you change the present set of parameters, parameters such as the voltage
for scanner driving will be changed. Be sure not to choose a wrong set of pa-
rameters.
•
Description
You can name six sets of parameters to distinguish them. When you change a set of
parameters, the information in the bottom right of an app
