TMPM5200-2
5-101
■
Obser
1.
T
he SPM Parameters window.
vation of an image
o start scans, click on the Scan button of t
The following images will be obtained.
Topography
(Topography
image)
(Capacitance
image)
Acos
φ
u can obtain an
o
3.
Increase the input sensitivity of the lock-in amplifier (from 50 mV to 100 nV
direction) using the SENSITIVITY setting key (
▼
) in the range in which the
signals from the lock-in amplifier do not saturate.
The area in which Acos
φ
(capacitance image) becomes white is the one in
which capacitance is large.
2.
Specify the SPM parameters for usual operation so that yo
ptimum topography image.
