５
MEASUREMENT OPERATION
5-160
TMPM5200-2
en.
4.
ing mechanism is rotated backward for dismounting, there
■
Shifting
Whe
the observation field, retract the tip or cantilever then
■
Shifting observation field (Middle shift)
When you want to shift the observation field within the scanner movement range, shift it
according to the following procedure.
1.
Click on the Scan Area button in the Scan frame in the SPM Parameters
window.
The following window will be displayed.
The tip position is readjusted.
—— CAUTION ———————
If you move the motor drive greatly, the tip gets too close to the
specimen surface or gets too far from the specim
Click on the Tip Retract button in the Tip window to deselect it.
Confirm using the oscilloscope that Z/20 is close to 0. If not, repeat steps 2 to 4
above.
The specimen-stage Z-axis motor-driving mechanism can be mechanically
dismounted to shut out external disturbances such as vibration and noises.
When the motor-driv
is a backlash of about 3/10 of a revolution.
observation field (Large shift)
n you want to greatly shift
manually shift the specimen stage.
