8 GENERAL
8.2 VIBRATION
ISOLATOR
8.2.1 Compressor
（
optional
）
Inspect the compressor and clean the filters periodically.
Drain: Shut down the entire instrument and open the drain cock to discharge water at
least once a month. Be sure to close the cock after draining off the water.
Filter cleaning: At least once or twice a year, shut down the entire instrument; remove
the air inlet using a screwdriver; take the filter out; and either replace it with a new one,
or wash and dry the filter and remount it.
Air filter: When water collects in the glass container of the air filter, push up the pin at
the bottom of the container to drain the water off.
Air filter
Filter
Air inlet
Drain cock
Pressure meter
Reser voir
Air hose
8.2.2 Vibration-Isolation
Table
The vibration-isolation table should be kept level even after it is pneumatically elevated
5 mm to 15 mm above the floor. Periodically inspect the table to make sure it is level and
at an appropriate height. If you find that the table is too low or not horizontal, contact
your local JEOL service personnel.
8-2
TMPM5200-2
