５
MEASUREMENT OPERATION
5-218
TMPM5200-2
The image appears after the brightness and contrast of the image for measurement
are automatically adjusted, but the tilt o
e image for measurement is not adjusted.
when you wish to know the tilt of the surface for meas-
•
M
DC Coup
Since
axes,
the s
scann
coup
Whe
even
the s
cons
in th
Tilt X, Y
The
the Back
ct only when the DC Coupling check
box is checked.
Brightne
You
•
Auto
The image appears after the tilt, brightness and contrast of the image for measure-
ment are automatically adjusted. Normally, use this display method.
•
No ASB (Auto Subtract Background)
f th
Use this display method
urement.
anual
All of the automatic adjustment functions are canceled, enabling you to manually
adjust tilt, brightness and contrast.
ling
the piezo scanner used in the SPM creates a structure combined with multiple drive
the movement of the X- and Y-axes may interfere with each other. Therefore, when
can range is large, a tilt in the X direction interferes with the Y-axis scanner (the
er moves as if a tilt also exists in the Y direction). Such a phenomenon is called DC
ling.
n the Background is Manual, if the scanning-plane tilt remains in the Y direction
if you have corrected the scanning-plane tilt in only the X direction, not only does
pecimen-plane tilt in the Y direction but also the effect of DC coupling can be
idered. In such a case, check the DC Coupling check box to enable the tilt correction
e Y direction.
software corrects the tilt in the scanning plane. This becomes effective only when
ground is set to Manual. Tilt Y is in effe
ss and Contrast
can correct image brightness and contrast.
