５
MEASUREMENT OPERATION
5-248
TMPM5200-2
ettings
of the Lithography window.
Vector S
Specify parameters for Vector mode in this frame
Parameters
Description
Max. Tip Speed/(nm/s)
Specify the speed of the tip movement in this input box.
Point Separation/nm
Specify the step gap for the tip movement in this input box.
Ope
when you click on this button.
n
A pattern is defined and the data stored in the file is loaded
Sav
ick on
this button.
e
The defined pattern is saved in the file when you cl
Define
A designed pattern is defined when you click on this button.
Write Mo
Selec
de
t the writing mode for lithography.
Parameters
Description
Vector
When this radio button is selected, the tip moves along the
pattern that has already been defined.
Trace
When this radio button is selected, lithography is performed
by manual operation of the mouse.
•
Tr
xecute lithography by moving
ouse on the Display Window while pressing the mouse button.
Form of F
A pattern-definition file is saved in ASCII (American Standard Code for Information
Inter
Wind
•
Vector mode
After selecting Vector, click on the Write button; then the tip will move along the
pattern that has already been defined.
Define the pattern using the Open or Define button prior to executing lithogra-
phy.
ace mode
After selecting Trace, click on the Write button; then e
the m
If 0 is specified in Time Period/ms, the same condition is retained while
pressing the left mouse-button.
The trajectory (pattern) of the mouse movement appears on the Display
Window.
ile
change) form, as shown below. This file itself can be edited using the Note pad of
ows98TM.
WinSPM Version 4.04
Vector saved on 9/9/1997 at 16:43:15
Vector created
*
on 9/9/1997 at 16:26:02
*Sta
*
x1
165
252
30 344 -10.000 1.000 1.00 1 0
rt comment lines with a '
＊
'
y1 - x1 y1: Bias Feedback Gain Hold External
355 349 250 -10.000 1.000 1.00 1 0
437 4
