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APPENDIX
7-14
TMPM5200-2
Loading motor-drive position calibration settings
1.
Start the WinSPM measurement mode with the system administrator
privilege.
2.
Follow Steps 2 to 4 above to open the Coarse Stage Advanced window.
3.
Click on Load Setting to display the Open dialog box.
4.
Select a file you want to load and click on the Open button.
The file extension is *.stg.
5.
Click the OK button to close the Coarse Stage Advanced window.
6.
Select Save Setting from the File menu.
The loaded motor-drive position calibration settings will take effect the next time
you start the system.
The scanner-sensitivity settings and changes specified as the system administrator
apply to all registered users.
