TMPM5200-2
6-9
5.
Set the light source of the 3-dimensional display image.
a.
Check Display Light Source Vectors in the Display tab.
The position of the light source and the illumination direction with respect to the
3-dimensional image are plotted.
b.
You can set a maximum of two light sources, so set the illumination direc-
tion of the light and the intensity of the illumination light using Light1 and
Light2 in the Display tab, while observing the change in the plotted light
source position and the 3-dimensional display image.
When setting two light sources, if you emit a strong beam using Light1, and
emit a weak beam using Light2 in the direction so as to cancel the shadow cre-
ated by the strong beam, you will obtain a clean, 3-dimensional display image.
6.
Perform precision computation for a 3-dimensional display.
a.
Remove the check from Display Light Source Vectors in the Displaytab.
b.
When the light source position display goes out, press the Plot all Points
button, and perform precision computation for the 3-dimensional display.
As a result of this computation, you can acquire a precise 3-dimensional display
image.
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Cross-Sectional Analysis (Profile)
When using the SPM, it is important to obtain information concerning the height
direction of the acquired image. There are four modes, “Single Profile”, which enables
you to select and measure an arbitrary cross-section in the measurement image, “Multi
Profile”, which enables you to display up to five cross-sections, “Extra Profile”, which
enables you to perform analysis of multiple frequencies simultaneously and “Multi
Image Profile”, which enables you to
analyze the cross-section of the same line on the up
to three different images.
In the case of a sample that has large surface irregularities, stepped parts of the
image may sometimes lack sharpness depending upon the shape of the probe tip.
For this reason, be careful when interpreting the measurement results.
Single Profile
1.
Click on the Single Profile shortcut icon.
The Single Profile window appears.
2.
Specify the measurement position with the mouse.
The measurement position is indicated by the arrow in the preview image of the
Single Profile window. You can specify an arbitrary cross-section by dragging the
starting and end points of the arrow with the mouse.
The cross-sectional view appears at the bottom of the window.
3.
If necessary, move the measurement marker into the cross-sectional view,
and perform measurement inside it.
Multi-Image Profile
1.
Display the first of a set of images
that you want to analyze in the Display
Window.
2.
Click on the Multi Image Profile shortcut icon.
The Multi Image Profile dialog appears.
