５
MEASUREMENT OPERATION
TMPM5200-2
5-231
input box since the Z motor drive position has been adjusted. All of
ntrolled by the SPM CONTROL unit. When performing
s near the specimen; in Step 2 Z Approach, specify the motor-drive speed
r the specimen. The relation between step 1 speed and
espectively, in the Tip Advanced window (Normally, set 3 for Step 1
2 for Step 2 Z Approach).
tion/V
these operations are performed by software control.
•
Approach by hardware control
The following function is not usually used for the JSPM-5200.We describe out-
line the summary of this functionbelow.
Approach is fully co
approach, specify the motor-drive speeds for Step 1 Z Approach and Step 2 Z
Approach. In Step 1 Z Approach, specify the motor-drive speed until the tip ar-
rive
after the tip arrived nea
step 2 speed should be: step 1 > step 2.
Set the corresponding motor speeds for Step 1 Z Approach and Step 2 Z Ap-
proach, r
Z Approach and
not auto-
,
In this approach, even when the approach finishes, the software does
ish. When you click on the Stop button in the Approach dialog box
matically fin
all the conditions specified by the software will terminate.
Approach has finished but processing has not finished.
The SPM CONTROL unit judges whether or not it finish the approach from the
voltage applied to the sc
anner. When starting approach or during approach, if
r150 V, approach cannot be performed automatically. Click on
he approach; then click on the Approach On button
the scanner voltage should change by electrical noise or other accidents, the
approach stops. In such a case, even though the voltage of the Z scanner returns
to the p
the Stop button to finish t
again.
