５
MEASUREMENT OPERATION
5-220
TMPM5200-2
of the SPM CONTROL unit, the maximum Y-axis scanning voltage is
from the ADZ terminal on
the rear of the SPM CONTROL unit is added to the Z-axis scanning signal. The
signal input from the
termina
ignal 20 times greater in
voltage through the piezo-drive high-power amplifier. In other words, inputting
a
±
1 V sine wave to
terminal
V.
The maximum inp
f the ADZ terminal is
±
10 V. However, if the sum
of the input voltage and Z-axis scanning voltage exceeds the power-supply
voltage of the SPM CONTROL unit, the maximum Z-axis scanning voltage is
rear of the SPM CONTROL unit is increased to the bias voltage. Unless
put from the ADB terminal is added as it is. When the
Bias-voltage output setting from the SPM CONTROL unit is High-voltage
Output, the signal is increased to a signal 20 times greater in voltage.
The maximum input rating of the ADB terminal is
±
10 V. However, as the
maximum bias voltage is about
±
12 V, the total added scanning voltage is satu-
rated at
±
12 V even if the signal input to the ADB terminal exceeds
±
12 V. For
the high-voltage output, if the sum of the input voltage and the bias voltage ex-
ceeds the power-supply voltage, the maximum bias voltage is saturated at the
power-supply voltage, because the maximum bias voltage becomes equal to the
power-supply voltage.
•
Scan Filter
Specify the filter for the scanning waveform using this button. When Scan Filter is
specified, the scanning waveform looks like as shown below.
voltage
saturated at the power-supply voltage.
•
Add External Z Signal
When this check box is clicked on, the signal input
ADZ
l is increased to a s
the ADZ
outputs
±
20
ut rating o
saturated at the power-supply voltage.
•
Add External Bias Signal
When this check box is clicked on, the signal input from the ADB terminal on
the
this check box is checked, the signal input from the ADB terminal is not added.
When the bias-voltage output setting from the SPM CONTROL unit is Normal
Output, the signal in
High frequency
Low frequency
When a high scanning speed is selected, vertical streaks sometimes appear on the
image. This is because vertical streaks are created by mechanical vibration of the
scanner due to acceleration at the top point of the triangular waveform. If such a
phenomenon occurs, the most effective remedy is to change the scanning speed to a
low speed. If the image quality deteriorates due to the change in scanning speed, set
this Scan Filter to a lower number.
