５
MEASUREMENT OPERATION
5-144
TMPM5200-2
s
■
Setting scanning parameter
Specify each parameter in the Advanced tab window according to the following
procedure.
1.
Click on the
button in the Acquisition selection box and select 512
×
512
from the pull-down menu.
2.
Click on the
button in the Clock/ms selection box and select 100.00 us
from the pull-down menu.
a
3.
C
This is the p rameter that determines the scan speed. Naturally, this parameter
should be changed according to the observation area and the unevenness of the
specimen. Here, set it to 100.00 us provisionally.
lick on the
button in the Mode selection box and select Normal from the
ull-down menu.
p
4.
Click on the Size box. When the numerical value is highlighted, enter 1um
using the keyboard and finalize the numerical value by pressing the Tab key.
the
Or, click on
button in the Size selection box and select a numerical
value near 1.000 um.
Here, Size differs depending on the scanner installed. In practice, set an appropriate
value according to the observation area.
5.
Click on the Bias box. When the numerical value is highlighted, enter 1 using
the keyboard and finalize the numerical value by pressing the Tab key.
semiconductor specimen or a specimen having
You should change the Bias value according to the specimen to observe. If it is a
conductive specimen like a metal, specify a small value (0.2 V or less), and specify
a large value (1.0 V or more) for a
an oxidized film.
