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ANALYSIS OPERATION
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Scanner Calibration
A tube-shaped piezoelectric scanner is used in the ultra-high vacuum SPM. This type of
piezoelectric element has a nonlinear dependence of displacement on voltage in scanning
as shown below.
Displacement
Voltage
In the SPM controller, the distortion-compensation unit is installed so that nonlinear
displacement can be removed.
Selecting Scanner Calibration from the SPM Scan menu opens the Scanner Calibration
window.
Specify parameters for compensation and values for displacement range compensation in
scanning. These corrections have been done in the factory before shipment.
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Scanner
The Scanner Calibration window allows you to save up to six sets of parameters
specified for a scanner calibration so that you can use multiple scanners. Choose the
desired set of parameters by clicking on the desired number in the pull-down
number list.
When you change the present set of parameters, parameters such as voltage for
scanner driving will be changed. Be sure not to choose a wrong set of parame-
ters.
•
Description
You can name six sets of parameters to distinguish them. When you change a set of
parameters, the information in the bottom right of an application window will be
changed, and the name given to the set of parameters will be displayed. The name
“STD Scanner” is given to the standard scanner in default.
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Enable Compensation
When this check box is checked, the distortion compensation to the XY scanner will
function. However, even if this is not checked, the calibration of the scanning range
will work.
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Change Compensation Parameters
Only the person who has the authority of administrator can change the parameters
for compensation. A floppy disk is provided which recorded the calibration data for
every scanner at the time of instrument shipment. You can read the calibration data
from the floppy disk by clicking on the Read Settings button.
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