K465i Operations and Maintenance
P/N 1212831 Rev C
Page 4-54
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
END-SHIFT IDLE PROCEDURE
As in scheduled startup, manufacturing locations must prepare for equipment shutdown and
restart, focusing upon non-stop production with cyclical scheduling of system readiness.
During normal down time the tool is left in the Idle state. The following maintenance checks
should be performed at the end of each work shift (see the
Procedure 4-20: End-Shift Shutdown
1. Verify that the system is in the Idle state.
2. Close the manual bubbler valves by first closing the inlet valves and then by closing the outlet valves.
For series bubblers: close valves on the upstream cylinders (closest to the carrier gas supply first),
and then close valves on the downstream cylinder. Tag valves that are closed during this step.
3. Verify that all temperature control baths have sufficient fluid levels to maintain circulation.
Note:
If the tool will be unused for several days the following additional steps (step 4 and
step 5) should be performed.
4. Verify that all toxic gas monitors have sufficient tape to provide continuous monitoring throughout the
shutdown period.
5. Using the front breaker switch, turn off the heater filament power supplies.
