K465i Operations and Maintenance
P/N 1212831 Rev C
Page 5-82
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2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
Figure 5-83. Retainer and Spring Contact
Gasket Cold Plate / Flow Flange
Notes:
-The gasket is only 0.003” thick and needs to be installed by two people to minimize folding
and creasing during installation.
-The gasket does not sit flat when placed on a flat surface. A crease is located
approximately midway between the outer and inner diameter of the gasket.