Veeco K465i GaN, Operation And Maintenance

Page: 342 / 352

K465i Operations and Maintenance P/N 1212831 Rev C
Page 5-201
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
Removing the Heat Exchanger
Notes:
Ensure that the heat exchanger power cable is disconnected.
Ensure that all facility water has been turned off.
Place a water jug nearby to collect the water.
Ensure that labeling for water lines and connectors cannot be removed from line ends, to
prevent reconnection errors. Re-label if necessary. Successful reconnection depends on
labels to remain intact ( Figure
5
-
165
and Figure
5
-
166
). See also Water Schematic .
39. Turn the Heat Exchanger off and disconnect all water lines between Heat Exchanger and Reactor.
40. Drain water (using the air gun) between the Heat Exchanger and the Reactor .
41. Disconnect the lines at the Quick-Disconnect connectors for the gray/yellow lines at the Heat
Exchanger interface plate.
42. Outside of the system, disconnect and remove all tubing (labeling the tubing first, if necessary) and
drain all water from the tubing using the air gun.
43.
Drain the Heat Exchanger’s main cavity/reservoir of all water with a hand pump.
44. Close all valves that remain open on the back of the heat exchanger.
45. Disconnect all lines at the closed valves and label.
46. Roll the Heat Exchanger out of the system frame.
47. Secure the lines to the system frame using tie wraps.
48. Coil the power cord and secure the coil to the heat exchanger using tie wraps.
Disconnect Gas Supply Lines
49. Ensure that all gas supply lines, including N
2
, H
2
, NH
3
, etc., are connected.
50. Ensure that all gas supply lines are purged and N
2
ambient.
51. Close all manual valves on the gas panel.
52. Close all manual valves for all N
2
lines on the system before proceeding to next step.
53. Turn off the house N
2
source at the facility source. Disconnect the N
2
line at the system connection.
Cap the N
2
gas line using VCR gaskets and caps.
54. Turn off the house hydrogen line at the facility source. Disconnect the Hydrogen line at the system
connection. Cap the Hydrogen gas line using VCR gaskets and caps.
55. Turn off the house air line at the facility source. Disconnect the air line at the system connection. Cap
the air line using end caps.
56. Disconnect the vacuum line at the exhaust manual valve.
Shutting Down and Disconnecting Electrical Services
57. Press the Black Process Stop Button.
58. Shut down all computers.
59. Shut down all sub-breakers to the CBA, one at a time.
60. Press the EMO button to turn off the system power.
61. Pull down flange handle to the off position on the CBP.