K465i Operations and Maintenance
P/N 1212831 Rev C
Page 5-147
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2012
Veeco Instruments, Inc. Confidential
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3. After about 1 minute, open the pneumatic ball valve in the Process Pump exhaust line.
4. Pump exhaust line down to vacuum.
5. Isolate the Ebara(s), using the manual isolation valve.
6. Connect the leak detector to the leak check port located between the Throttle Gate Valve and the
particle filter.
7. Pump down leak check port using the leak detector.
8. Leak check the leak check connection port. Once the connection is leak tight, open leak check port
manual valve.
9. Leak check the particle filter housing by spraying helium around the particle filter front plate, to ensure
that the seals are tight. Refer to the procedures in Section 16, Leak Checking for further details.
10. Close off the leak check port manual valve, remove leak detector, and cap leak check port.
11. Re-open the Ebara(s) with the manual isolation valve.
12. Remove any air between the leak check port manual valve and the cap, by opening the valve and
allowing the process pump to draw it out. After one to two minutes close the valve.
13. Place the system in
Idle
Startup Following a Maintenance Shutdown
located in Operations, K465i GaN System Startup section.
Note:
It is recommended that a thorough Reactor Chamber Bake-out is performed prior to
utilizing the system for product growth runs after this procedure is performed.