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K465i Operations and Maintenance

P/N 1212831 Rev C

Page 4-12

Copyright

©

2012

Veeco Instruments, Inc. Confidential

All Rights Reserved

Safety Precautions and Hazard Management



In addition to the technician responsible for operating the system, a second site-
qualified technician must be present in the building when operating the system.



Before initiating the startup procedure make sure by checking with the system
supervisor or facility safety coordinator that all safety conditions have been met.



Verify that no safety alarms are currently occurring and that recently recorded

alarms have been properly acknowledged and addressed.



Never turn on any vacuum pump without having a free exhaust path; i.e., open all
valves downstream of the pump.



Do not touch the pump casing and exhaust piping during operation, or for a period of
time after operation ceases; do not remove the pump cover during operation.

PROCEDURES IN THIS SECTION



Process Pump



Pre-Operation of the Ebara Process Pump



Ebara Process Pump - Local Mode



Ebara Process Pump - Remote Mode



Vacuum (Scroll) Pump



Turbo Pump

REFERENCE DRAWINGS

The following drawings are provided to assist in the performance of the procedures
contained in this section:



Reference Drawings List



System Footprint



Gas Schematic Diagram (GSD)



ASSOCIATED PROCEDURES



Leak Checking

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Summary of Contents for K465i GaN

Page 1: ...K465i GaN Operations and Maintenance P N 1212831 Rev C June 2012 ...

Page 2: ...E PAGES AFFECTED CHANGE 1212831 Rev A Jan 5 2012 Initial Release 1212831 Rev B June 8 2012 JAE all Chapters 1 3 4 5 Appendix 1212831 RevC Aug 24 2012 JAE all Chapter 5 Procedures Disclaimer This document describes the proper safe operation and maintenance practices of highly complex technical equipment Every effort has been made to include compliant instructions warnings and guidelines to ensure t...

Page 3: ...2 2 SEISMIC SPECIFICATIONS 2 18 Design Considerations 2 18 Weight of the Major Sub Assemblies 2 20 Reference Drawings 2 20 SECTION 2 3 CERTIFICATIONS 2 21 CE Certifications 2 21 EMC Certifications 2 21 SEMI Certifications 2 21 RoHs Compliance 2 21 CHAPTER 3 SYSTEM OVERVIEW 3 1 SECTION 3 1 SYSTEM FUNCTION AND USAGE 3 3 SECTION 3 2 ELECTRICAL CIRCUIT BREAKER ASSEMBLY CBA MODULE 3 6 SECTION 3 3 ELECT...

Page 4: ...ECTION 4 3 WAFER LOADING AND UNLOADING 4 21 Procedures in this Section 4 21 Reference Drawings 4 21 Associated Procedures 4 21 Tools and Materials Checklist 4 21 Loading Substrates Onto a Wafer Carrier 4 22 Unloading Substrates From a Wafer Carrier 4 23 SECTION 4 4 PALLADIUM CELL OPERATION 4 25 Procedures in this Section 4 25 Reference Drawings 4 25 Operating Precautions 4 26 Cell Installation 4 2...

Page 5: ...e 4 54 Maintenance Shutdown Procedure 4 55 Facilities Maintenance Shutdown Procedure 4 60 Emergency Electrical Shutdown 4 62 CHAPTER 5 MAINTENANCE AND REPAIR 5 1 SECTION 5 1 ROUTINE MAINTENANCE 5 2 Routine Maintenance Schedule 5 2 SECTION 5 2 BASIC MAINTENANCE STEPS 5 4 Maintenance Preparation 5 5 SECTION 5 3 K465I GAN REACTOR CHAMBER MAINTENANCE 5 6 Procedures in this Section 5 6 Reference Drawin...

Page 6: ...ts 5 119 Recommended Tools and Materials 5 120 Cleaning Procedure 5 122 Leak Checking the Transfer Hub Chamber 5 123 Robot Maintenance 5 124 SECTION 5 7 PARTICLE FILTER MAINTENANCE 5 127 SECTION 5 8 PARTICLE FILTER MAINTENANCE ERROR BOOKMARK NOT DEFINED Equipment List 5 127 Supplies 5 127 Fast Flow Prevention Safety 5 128 Leak Checking the Housing Assembly and Chamber 5 146 Material Disposal and D...

Page 7: ...ONS 5 174 Procedures in this Section 5 175 Reference Drawings 5 175 Associated Procedures 5 175 Recommended Tools and Materials 5 176 Procedures in this Section 5 177 Reference Drawings 5 178 Associated Procedures 5 178 Associated Documents 5 178 Recommended Tools and Materials 5 179 Heater Assembly Removal 5 180 Preparation for Filament Replacement 5 185 Installation of Replacement Heater Assembl...

Page 8: ...7 Figure 4 10 Pyrometer Locations on Wafer Carrier 4 40 Figure 4 11 Robot Transfer System Stations Glovebox Configuration 4 44 Figure 4 12 Stop Robot Button 4 45 Figure 4 13 Robot Station Labels 4 46 Figure 4 14 Top View Z Axis Elevator Motor Locations 4 46 Figure 4 15 Generic EPO IDLE Shutdown Diagram 4 55 Figure 4 16 Generic System Diagram 4 56 Figure 4 17 EMO Button 4 62 Figure 5 1 Process Modu...

Page 9: ... Wiping of Front Viewport 5 41 Figure 5 38 Wiping of the Pass Thru Area 5 42 Figure 5 39 Vacuuming of the Shutter 5 43 Figure 5 40 Wiping of Flow Flange Bottom 5 44 Figure 5 41 Vacuuming of the Exhaust Ring 5 45 Figure 5 42 Heater Baseplate Assembly 5 47 Figure 5 43 Heater Baseplate Assembly Bottom View 5 48 Figure 5 44 Generic System Diagram 5 50 Figure 5 45 Flow Flange Tubing and Water Connectio...

Page 10: ...te onto Flow Flange 5 86 Figure 5 88 CFI Weldment into Cold Plate 5 87 Figure 5 89 Fastening CFI Weldment 5 87 Figure 5 90 Lowering Flow Flange Assembly onto Shutter 5 88 Figure 5 91 Flow Flange Assembly Lowered onto the Shutter 5 89 Figure 5 92 Shutter Tube Spacer 5 90 Figure 5 93 Wiping O Ring Surfaces Aligning Shutter Tubes with FF Holes 5 90 Figure 5 94 Cleaning and Assembling Lower Bellows Fl...

Page 11: ... Cap Removed 5 137 Figure 1 159 Removed Filter 5 137 Figure 1 160 Lower 1st Stage 5 138 Figure 1 161 Particle Filter Assembly on Cart 5 140 Figure 1 162 Filter and Insert 5 140 Figure 1 163 Gen 3 Filter Assembly with Baffle Plate Bottom View 5 141 Figure 1 164 Gen 3 Filter Assembly Sections 5 142 Figure 1 165 Filter and Insert into Outer Housing 5 143 Figure 1 166 O ring and Second Stage 5 144 Fig...

Page 12: ... 5 195 Figure 5 160 Bubbler Jumper 5 196 Figure 5 161 THA Interior and Robot Arms 5 197 Figure 5 162 Flushing the Water Lines with Compressed Air 5 198 Figure 5 163 Capped Water Lines 5 199 Figure 5 164 Water Lines Connected to Monitors Regulators 5 200 Figure 5 165 Castor Mounting 5 203 Figure 5 166 LFA GB 5 205 Figure A 1 Glove Box Window with Extension Icon 6 1 ...

Page 13: ...CD associated with this document includes the InSitu Monitoring device operation manuals and Nexus Operating System documents The information in this document is organized as follows Chapter 1 SAFETY SUMMARY The Safety Summary is a comprehensive guide to the safety notices warnings precautions and instructions required to operate and maintain this system safely Safety related notices throughout th...

Page 14: ...d on these two lists are hyper linked to specified documents To use the lists select the listed desired subject procedure component document or drawing This will automatically activate a view of the document on your selected page or drawing Each individual section begins with a list of any Safety Precautions and Hazard Management messages applicable to that section The safety list is followed by a...

Page 15: ...e Operation and Maintenance Manual for associated procedures For safe lifting transporting and handling reference the documents PRS 141 and MI 0000293 provided with the tool packing list Use a step ladder when repairing or cleaning components out of reach GENERAL SAFETY NOTICES The following general safety notices supplement the specific warnings and cautions appearing elsewhere in this manual The...

Page 16: ...ould not be held when taking mea surements Sensors and Dry Contacts Sensors in the ventilation areas of this system provide notification of potentially dangerous atmospheric changes leaks and gases Moving Equipment Personnel should remain clear of moving equipment If equipment requires adjustment while in motion a safety watch should be posted The safety watch should have full view of operations b...

Page 17: ...arnings cautions and notes as they are used in this manual Identifies an operating or maintenance procedure practice condition or statement that if not strictly followed could result in serious injury or death to personnel or long term health hazards to personnel Identifies an operating or maintenance procedure practice condition or statement that if not strictly followed could result in equipment...

Page 18: ...K465i Operations and Maintenance P N 1212831 Rev C Page 1 4 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved ...

Page 19: ...es until they are known to be dead When working near electricity do not use metal rules flashlights metallic pencils or any other object that have exposed conducting metal De energize all equipment before connecting or disconnecting meters or test leads When connecting a meter to terminals for measurements use a range higher than that of expected voltage Verify that the area is well ventilated whe...

Page 20: ...gas line wrapped with heater tape High voltage power is supplied to the System breaker panel Do not perform any maintenance tasks within the breaker panel without first isolating the external power source to the system There may be more than one source of power supplying the system Disconnect all sources of supply power prior to servicing This includes any optional Uninterruptible Power Supply UPS...

Page 21: ...ty Feed Throughout System Silicon Tetrahydride SiH4 either 100 PPM Silane in ultra high purified Hydrogen or 200 PPM Disilane in ultra purified Hydrogen Si2H6 Facility Feed Throughout System TriMethyl Gallium TMGa Bubbler Throughout System TriEthyl Gallium TEGa Bubbler Throughout System TriMethyl Alumimum TMAl Bubbler Throughout System TriMethyl Indium TMIn Bubbler Throughout System BiS cyclopenta...

Page 22: ...ure Low 10 12 psi EpiView or Nexus System Shut Down Pneumatic Pressure Low 70 psi EpiView or Nexus System Shut Down Process Pump Exhaust Over Pressure 2 psi EpiView or Nexus System Shut Down Cabinet Ventilation Pressure Low 0 5 water EpiView or Nexus System Shut Down and Activate Gas Panel Minimizer Bank H2 Detector 0 5 LEL EpiView or Nexus System Shut Down and Activate Gas Panel Minimizer Bank Hy...

Page 23: ...condition After the interlock relay has been activated the Thermocouple Interlock Enable button must be pushed to reset the system If the Thermocouple Interlock Enable button is not pressed within ten minutes the system initiates a hard shut down setting all digital and analog outputs to their zero state INTERLOCK OVERRIDE SAFETY NOTICE Facility digital output Dout 162 indicates that the system is...

Page 24: ... other energy isolation devices The RESET Button After the EMO buttons are pulled out the Reset button must be pushed to reset the Safety Circuit The ON Button The ON button starts the tool after the main power lever is moved to its UP position EMO Manual Pushbuttons Pushbuttons 4 are located on the front and back of the unit Additional pushbuttons may be supplied in the event that remote operatio...

Page 25: ...g a reset after all hardware alarms are cleared The Process Stop pushbutton is located on the unit on a panel with one of the EMO pushbuttons When the Process Stop pushbutton is pushed all operations associated with the process or recipe such as gas flow are inhibited This is achieved by an input to the Programmable Logic Controller which is then interpreted by the software program to inhibit the ...

Page 26: ...functioning correctly during operation To enable robot operation the activated Robot pushbutton must be pulled out and then operation is enabled from the control computer Alarm Buttons The Alarm Silence button disables a Hardware Audible Alarm trigger The Alarm Reset button resets the hardware safety relays Table 1 3 Hardware Alarm Functions ALARM SILENCE ALARM RESET ALARM STATUS Lights OFF OFF OK...

Page 27: ...in Table 1 4 below This table lists forms of energy that may pose a danger and these forms of energy must be considered and controlled while servicing or maintaining the system Table 1 4 Types of Hazardous Energy Associated with K465i GaN HAZARDOUS ENERGY FORM SYSTEM APPLICATION Electrical 480V 150A 380V 200A Motors Electrical Circuits and Breakers Power Supplies Pumps Controllers Mechanical Belts...

Page 28: ...on 7 Tagout device application Where tagout devices are used with energy isolating devices designed with the capability of being locked the tag attachment shall be fastened at the same point at which the lock would have been attached Where a tag cannot be affixed directly to the energy isolating device the tag shall be located as close as safely possible to the device in a position that will be im...

Page 29: ... Notify persons in the area that the equipment is to be re energized The work area shall be inspected to ensure that nonessential items have been removed and to ensure that machine or equipment components are operationally intact Verify all safety grounds have been removed Verify all covers and guards have been properly replaced The work area shall be checked to ensure that all technicians have be...

Page 30: ...K465i Operations and Maintenance P N 1212831 Rev C Page 1 16 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved ...

Page 31: ...tem Refer to the System Footprint drawing for additional information regarding system specifications and installation Section 2 1 GENERAL SPECIFICATIONS COMPANY ADDRESS Veeco Instruments TurboDisc Operations 394 Elizabeth Ave Somerset NJ 08873 SYSTEM SPECIFICATIONS Model TurboDisc K465i GaN MOCVD System Serial 26895 Rated Voltage Current Frequency 380V 280A 50 60Hz Year Constructed 2008 Noise leve...

Page 32: ...icensed in local municipality of the equipment point of use In accordance with SEMI S2 0200 for equipment containing hazardous production materials the equipment should be designed to withstand a horizontal loading of 94 of the weight of equipment acting at the equipment s center of mass And overturning moment should use 85 of the weight of the equipment DESIGN CONSIDERATIONS The complete system w...

Page 33: ...ation and roof elevation Rp 1 5 shallow anchor bolts Horizontal force acts as shear force on the floor fasteners The shear force lb n F F p s 18 211 12 2 2534 Where n 12 the number of anchor bolts Recommended anchors are diameter expansion bolts ASTM A325 or F1852 Shear stress psi S psi R psi A F s w u b s 16000 48000 28 632 334 0 18 211 Where Ab 0 334 2 in area of cross section Ru 48000psi ultima...

Page 34: ...Where in tension strength ultimate psi 60000 Vu w 20000psi allowable tensile working stress psi f V s u w 20000 3 60000 Safety factor 5 66 4 300 20000 W k WEIGHT OF THE MAJOR SUB ASSEMBLIES CBP 750 lb ECA 1000 lb PMA 3750 lb RCA 312 lb RTA 495 lb WHA 2250 lb Total 8557 lb REFERENCE DRAWINGS The following drawings are provided to assist in the performance of the procedures contained in this section...

Page 35: ... 2005 EMC Generic standards Immunity for Industrial Environments EN 61000 6 4 2001 EMC Generic standards Emission for Industrial Environments SEMI CERTIFICATIONS S2 0306 Safety Guidelines for Semiconductor manufacturing Equipment S8 0705e Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment S9 1101 Safety Guideline for the Electrical Design Verification Tests for S...

Page 36: ...K465i Operations and Maintenance P N 1212831 Rev C Page 2 22 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved ...

Page 37: ...on atom thin layers of material deposited on a wafer by controlling the introduction of gases and other materials in sequence introduced into a carefully heated pressurized chamber The wafer rotates horizontally at controlled speeds in the reactor chamber allowing further control over the deposition and the gases and materials flow through the chamber and into cooling and filtration systems that p...

Page 38: ...K465i Operations and Maintenance P N 1212831 Rev C Page 3 2 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 3 2 K465i GaN System Controls Architecture ...

Page 39: ...d rapid temperature ramping In situ monitoring DRT provides real time analysis of wafer temperature and growth rates There is also a Transfer Housing loadlock system for high safe throughput and extensive cooling and exhaust systems for safety and system longevity Figure 3 3 K465i GaN System Assembly The K465i GaN depicted in Figure 3 3 above can be used for blue green and ultraviolet UV LEDs sola...

Page 40: ... the K465i GAN include System Electronics Control Software System In Situ Monitoring Water Cooling System Alarms and Interlocks There are emergency shutoff switches EMOs spaced regularly along the periphery of the K465i GAN There is an efficient and easily manageable upper exhaust system for all modules The bottom level of the entire K465i GAN includes separated lines for high power with lines for...

Page 41: ...opyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Modules are connected by sets of four bolts between each module frame assembly casters are replaced with metal feet The electronics in the mezzanine level of a module are specific to that module ...

Page 42: ...ht 2012 Veeco Instruments Inc Confidential All Rights Reserved Section 3 2 Electrical Circuit Breaker Assembly CBA Module The CBA houses incoming power into the other modules and separates power into lower Utility level and upper Low Power and Digital signals for each ...

Page 43: ... 7 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Section 3 3 Electric Rack ECA Power Supply Module The Electric Circuit Assembly ECA Power Supply Module houses common controls for the entire system while providing power supply controls ...

Page 44: ...K465i Operations and Maintenance P N 1212831 Rev C Page 3 8 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved EMO and control switches are near the vented door of this module ...

Page 45: ...Maintenance P N 1212831 Rev C Page 3 9 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved The well ventilated modular control electronics area ECA rear view has sufficient space for additional components ...

Page 46: ...art stop and switch gas flow manual valves used to stop or redirect gas flow or for isolation of leak check ports needle valves used for fine control of gas flow when no MFC is in use Mass Flow Controllers Used to regulate control the amount of gas flow in the system as set by a user not to be used for maintenance isolation Flow Control System Overview shown below Pressure Controllers used to regu...

Page 47: ...K465i Operations and Maintenance P N 1212831 Rev C Page 3 11 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved ...

Page 48: ...s Inc Confidential All Rights Reserved Binary Gas Monitor Used to measure concentration of source materials in gas stream on outlet of bubbler can be set up to monitor or to control concentration by controlling amount of gas flow into bubbler Injector Blocks perform as shown below PC PC PC PC ...

Page 49: ...212831 Rev C Page 3 13 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved The Source Delivery Assembly SDA delivers precise amounts of gases in a leak tight environment providing gas switching for abrupt interface control ...

Page 50: ... is a set of bubbler slices and bubblers in water cooled temperature regulating liquid refrigeration baths The Modular Reconfigurable Gas Panel Includes Supply Gas Regulator Slices A slice is a section in a module in which related connected system parts are mounted together Hydride Dopants Vaccum Vent Leak Check Assembly Supply Gas Assembly Hydride Shroud Assembly Flow Panel with Injector Block Ph...

Page 51: ...K465i Operations and Maintenance P N 1212831 Rev C Page 3 15 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Alkyl Injector Block Hydride Alkyl injectors ...

Page 52: ...nd Bubbler Slices one slice includes controls a single bubbler and its flow generating different metal organic compounds into the gas flow Gas Hydride slices Alkyl slices for use of single or double Alkyl network combinations Gas Protection Network System Gas Interfaces Mezzanine level exhaust separate from the main module electronics at the Mezzanine level are not exposed to hydrogen gas at this ...

Page 53: ... are Reactor Electronics Growth Chamber Assembly Reactor Housing Assembly RHA a stainless steel construction that receives all gases regulated in the SDA through its upper section Flow FlangeTM Alkyl Injector Module which regulates which gases will enter and leave the chamber One side vents to the back of the unit and the other side vents to the chamber Hydrides and gas flow into the flow flange u...

Page 54: ...K465i Operations and Maintenance P N 1212831 Rev C Page 3 18 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved ...

Page 55: ...e are Reactor Electronics Growth Chamber Assembly Reactor Housing Assembly RHA which receives all gases regulated in the SDA Heater Assembly Water cooling system Alkyl Injector Module regulating which gases enter and leave the chamber One side vents to the back of the unit and the other side vents to the chamber Hydrides and gas flow into the flow flange and into the vent ...

Page 56: ...tenance P N 1212831 Rev C Page 3 20 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Reactor with InSitu Monitoring installed Flow Flange illustration including the upper ports and mounted shutter assembly ...

Page 57: ...shield blocks excess process gases from moving beneath the wafer carrier and affecting temperatures The Flow Flange is used to direct gases at the spinning wafer carrier providing a means for distributing the gases throughout the growth chamber and over the whole susceptor surface It has a water cooled assembly with separate inputs for alkyls and hydrides to eliminate pre reactions and Viewports w...

Page 58: ...aintenance P N 1212831 Rev C Page 3 22 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Temperature controlled baseplate dual o ring seals and spindle rotation delivered by a high speed servo drive motor ...

Page 59: ...3 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved A view of the exterior wall of the RHA shows the Water Facility Interface and regulators where incoming flows from the Heat Exchanger and Water Facility Interface supply the reactor s water ...

Page 60: ...ws and distribution The Interface Facility distributes water for the reactor Water flows independently from the Facility Interface to from the reactor and in separate lines it flows to from the Heat Exchangers single one shown and then to from the reactor The reactor is not connected to other areas of the system frame modules aside from that of the Gate Valve This isolation makes the reactor assem...

Page 61: ...Assembly THA Figure 3 4 THA Top View Illustration Optional GloveBox on Right The Transfer Housing Assembly Chamber with viewports includes Vacuum Robot for wafer carrier transfer Transfer Hub Two shelf Loadport Glovebox optional Laminar flowhood and pedestal optional Slit Valves for isolation at separate atmospheres Turbo turbomolecular Pump optional Dry Pump ...

Page 62: ...om the room into the reactor without transfer of gases in either direction O2 and H2O from the room or toxic and flammable gases from the reactor Automated transfer also allows the reactor to be operated at maximum throughput In a glovebox configuration depicted here without a door the Wafer Carrier Transfer Chamber may be referred to as the Storage Module In a non glovebox configuration with an e...

Page 63: ...831 Rev C Page 3 27 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Transfer Hub housed above the Particle Filters The THA Gas Flow Panel regulates the gas flow for the THA with or without the Optional Turbomolecular Pump ...

Page 64: ... for the loading of wafer carriers into and out of the THA in the non glovebox configuration Wafer Carriers as depicted in this image are loaded in and out of the Wafer Carrier Transfer Chamber The THA includes the Robot Controller configured in the THA The Dry Pump shown in a configuration below the Robot Control Computer is used for THA pumping during routines and for maintaining constant static...

Page 65: ...K465i Operations and Maintenance P N 1212831 Rev C Page 3 29 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Optional Glovebox Unit or Laminar Flow Assembly illustrated here ...

Page 66: ...on byproducts Main Process Pump2 Throttling Gate Valve for reactor pressure control This valve maintains growth chamber pressure at a desired setpoint with signal input from the growth chamber baratron and position indication on the valve on the valve controller and on the Nexus screen Baratrons Isolation Valve 1 5 exhaust line Ebara ESA25D A70W process pumps 2 Positive displacement vacuum pumps w...

Page 67: ...throttling valve Overpressure protection via switch gauge Exhaust materials post reaction gases flow from the Reactor to the Process Exhaust Assembly PEA The exhaust system controls growth chamber pressure and removes contaminants from the exhaust gas stream THA Transfer Housing Assembly Module PEA Process Exhaust Assembly Module Exhaust WHA Throttling Valve Baratron Isolation Valve and Main Proce...

Page 68: ...Reserved Particle Filter view from rear of WHA PEA with dual particle filters shown Material flows from the reactor through the Particle Filter Housing through the Pressure Regulator into the pump and out to the facility board Note that dual particle filters may be in use this is the location of particle filter maintenance ...

Page 69: ...g of Veeco TurboDisc MOCVD control systems based upon PLC controllers and DeviceNet communication protocols DeviceNet operates through the use of and internal Ethernet IP common industrial protocol CIP over Ethernet The DeviceNet ToolBox is designed to work as a standalone application and does not require any additional software Figure 3 5 DeviceNet Main Window DeviceNet software scans the compute...

Page 70: ...ware is capable of running executable scripts to which information is written about configurations operations or maintenance PLC Omron with software integration Power Supplies AC DC 9 DC power supplies for heater power MEM MFC MFCs metal sealed used for source carrier push and gas dilution direct input Control Modules ECA CBP GenMark Robots handle Location Servos and Vacuum Control Codes ...

Page 71: ...le data rate and signal selection Deviation alarms to identify non appropriate activities On line help Advance trouble shooting and diagnostic tools automated maintenance Event recording of system status and alarms Definable levels for system security PC Dell Power Edge 2950 Dual Core Intel Xeon 5130 4MB Cache 2 00GHz 1333MHz Fs 1GB 533MHz 2x512MB single ranked DIMMS Two 73GB SAS 10K RPM RAID 1 Wi...

Page 72: ...rameters Figure 3 7 Nexus Window NEXUS software performs these primary functions Process Control HMI Human Made Interface The NEXUS Main Operation Window displays a gas flow diagram of the K465i GaN and serves as a Graphical User Interface GUI From this window users can set valve positions enter set points for system controls monitor the process parameters safety interlocks visual alarm The signif...

Page 73: ... parameters for valve states analog scales and set points Data logging and viewing with configurable data rate and signal selection Export of data files to Microsoft Excel for analysis and presentation with automatic data compression Deviation alarms to identify non appropriate activities On line help Advance trouble shooting and diagnostic tools automated maintenance Event recording Data Log of s...

Page 74: ...r reflectivity at 930 nm and at 658 nm wavelength Growth rate and layer thickness calculated from reflectivity data Mechanically the DRT 210 combines Veeco s emissivity compensated pyrometer RealTemp200 RT200 with the Deflectometer These two devices are mounted on the common optical base and share the same viewport There is a special viewport adapter that provides the required mechanical stability...

Page 75: ...eat Exchanger regulates temperature automatically at a desired set point Water flows in and out of the reactor and its cooling band to provide temperature control for the heater and entire chamber assembly Facility water and Heat Exchanger water provide cooling of the reactor through separate cooling channels and separate water pressure regulators monitors The Heat Exchanger unit cools facility wa...

Page 76: ...e levels each level connected to others while functioning independently see Chapter 1 Safety Summary Software Alarms PLC Primary Logic Controller Alarms Hardware Alarms Interlocks The default setting for the alarms in this system is that of an open N O or un energized state The K465i GaN Alarms system has digital control elements and additional control elements The digital control system for the K...

Page 77: ...em Readiness Checklist Maintenance Shutdown and Bakeout process runs Wafer Operations Loading and Unloading through THA in out of RHA Growth Recipe Development and Implementation Shutdown Procedures Decommissioning Guidelines Shipping Instructions Routine Maintenance and Troubleshooting Reactor Chamber Maintenance Cleaning of Critical System Components Flow flange Maintenance Heater Assembly Maint...

Page 78: ...K465i Operations and Maintenance P N 1212831 Rev C Page 3 42 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 3 10 Generic System Process Diagram ...

Page 79: ...This chapter employs linked reference documents such as the System Readiness checklists To access these references click on the linked highlighted or blue text Most operations of the K465i involve the use of Nexus control software Reference the Nexus User Manual where needed Section 4 1 K465i GaN System Startup This section describes the system startup of the K465i GaN system following a shutdown ...

Page 80: ...K465i Operations and Maintenance P N 1212831 Rev C Page 4 2 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 4 1 Front View Assembly ...

Page 81: ...ditions have been met Verify that no safety alarms are currently occurring and that recently recorded alarms have been properly acknowledged and addressed PROCEDURES IN THIS SECTION Daily Startup and System Readiness Startup Following a Maintenance Shutdown Startup Following a Facilities Maintenance Shutdown or Emergency Electrical Stop REFERENCE DRAWINGS The following drawings are provided to ass...

Page 82: ...ist Review the previous shift log and confirm system readiness with the shift engineer Using the computer source monitor check Hydrides Gases for adequate supply and that the isolation valves are open and ready for use Using the computer source monitor check that the necessary Alkyl sources are in adequate supply and that their isolation valves are open and ready for use Ensure that the needle val...

Page 83: ...f the exhaust pump is not running start the pump s by following the procedure in the Vacuum Pump Operation section 2 Open the manual valve s just before the Process Pump 3 After about 1 minute open the Throttle Gate Valve to 20 4 After about 1 minute open the pneumatic ball valve in the Process Pump exhaust line 5 After about 1 minute open the manual valve just downstream of the reactor 6 Open the...

Page 84: ...eding Note When you have reached system Idle status in Nexus implement the System Readiness checklists before proceeding Procedure 4 5 Gas Panel Pressurization Procedure 1 Open the facility isolation valves for hydrogen and nitrogen 2 Using the Nexus control software open the nitrogen supply valve to the gas panel typically valve 23 Verify that the manifold pressure gauge reads above the red setpo...

Page 85: ...ow Assembly controller as part of system Preventive Maintenance Procedure 4 7 Cooling Water Procedure 1 Check that the flow meters are operational and that they are at the set point 2 Open Verify opening of the cooling water isolation valves for the reactor chamber and flow flange Turn on the water heat exchanger and verify proper operation 3 Ensure that the Heat Exchanger liquid level is normal a...

Page 86: ...DRIDE INJECTOR MFCs 4 N2 PUSH LINE N2 PUSH INJECTOR MFCs 5 PORT PUSH LINE ALKYL INJECTOR MFCs 5 MANUAL VALVES ALKYL INJECTOR BLOCK LFA GB ISOLATION VALVES TRANSFER HUB PARTICLE FILTER ISOLATION VALVES PNEUMATIC BALL VALVE V2 THROTTLE GATE VALVE MANUAL VALVE V1 TO EXHAUST i d1 f c h k b e a g FROM H2 SOURCE REACTOR FROM N2 SOURCE PROCESS PUMPS HUB PUMP LFA GB PUMP Figure 4 2 Generic System Diagram ...

Page 87: ...st Maintenance Shutdown Emergency Electrical Stop Startup 1 Close Verify closing of all alkyl bubbler manual valves inlet and outlet 2 Verify that the switches on the heater filament power supplies are in the Off position 3 Push the Process Stop button in on the Reactor Housing Assembly RHA exterior to ensure that the system remains in shutdown after power has been restored 4 Pull out the four Red...

Page 88: ...tor the reactor pressure making sure that the pressure is dropping at approximately 10 torr sec 19 When the reactor pressure reaches below 10 torr place the Throttle Gate Valve back in the position option Gas Panel 20 Open Verify open the facility air hydrogen and nitrogen supply isolation valves 21 Verify that the compressed air switch gauge is reading 90 to 100 psig 22 If installed heatup the pa...

Page 89: ...s empy c Home the robot using the HOM command d Restore the working speeds and accelerations by entering the RSA command Final Startup Steps 33 Check line heating 34 Check to ensure that gas line heaters are on and active 35 Open the facility source isolation valves for the dopant and hydride sources 36 Open the manual bubbler valves by opening the outlet valves first and then the inlet valves For...

Page 90: ...and that recently recorded alarms have been properly acknowledged and addressed Never turn on any vacuum pump without having a free exhaust path i e open all valves downstream of the pump Do not touch the pump casing and exhaust piping during operation or for a period of time after operation ceases do not remove the pump cover during operation PROCEDURES IN THIS SECTION Process Pump Pre Operation ...

Page 91: ...ro Polyether PFPE oil The pump casing itself is free from oil by introduction of N2 gas to the shaft seal to provide clean lubrication N2 gas can also be used to dilute effluent gas if the reaction by product is corrosive or hazardous Because the pump compresses gas from a vacuum to atmospheric pressure significant heat is generated The pump will not start without sufficient N2 purge and cooling w...

Page 92: ...r clockwise 6 Turn on the N2 gas flow to the Nitrogen House Feed line Open the N2 purge valve If the pump is not running at this time this valve will remain open for 25 seconds After 25 seconds the valve will shut and the operator will cycle the valve closed and open the valve through control software for an additional 25 seconds 7 If not already open open the pneumatic valve in the Nitrogen House...

Page 93: ...K465i Operations and Maintenance P N 1212831 Rev C Page 4 15 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 4 3 Ebara Pump Front View Figure 4 4 Ebara ESA25 Pump Side View ...

Page 94: ...ss to start Main Pump and Booster Pump STOP Press to stop Main Pump and Booster Pump DISP SELECT For changing LCD indication Table 4 1 RESET For resetting ALARM and TRIP BUZZER OFF For buzzer mute in ALARM TRIP LEDs B P RUN Indicates Booster Pump running when lit M P RUN Indicates Main Pump running when lit LOCAL Indicates LOCAL mode when lit ALARM Indicates ALARM condition when lit TRIP Indicates...

Page 95: ...ere is a green band on the pressure gauge indicating the proper range 4 If the ALARM TRIP signal is active refer to the troubleshooting guidelines in the Ebara maintenance manual After the cause for the ALARM TRIP signal is remedied press the RESET button on the LCD controller Figure 4 5 Note When the buzzer mode is in use the buzzer can be stopped by the BUZZER OFF switch Running the Pump 5 While...

Page 96: ...ge with N2 gas for a minimum of 1 hour after the pump stops Do not stop the N2 gas when shutting down the pump for a short period Caution Leave cooling water running for at least one hour after stopping the pump to cool the pump casing Take note that the casing remains very hot even after the pump is off 7 Close the Throttle Gate Valve by activating the Close option in Nexus controls 8 Close the m...

Page 97: ... system Specific starting instructions for a scroll pump used as a Transfer Hub backing pump in conjunction with the Turbo pump are included in the Turbo pump section Procedure 4 11 Vacuum Scroll Pump Starting the Pump 1 Check the Nexus screen to make sure that all gases are shut off all pneumatic valves are closed and all mass flow controllers are set at 0 2 Make sure that the isolation valve jus...

Page 98: ...sure The Turbo Pump requires minimal maintenance The operation of the turbo pump is identical to that of the standard non turbo system except that there is a turbo pump in line between the hub and the standard hub vacuum pump The hub is pumped through the turbo at all times When the vacuum valve that is pumping the hub is opened the turbo pump will turn on automatically By the time the hub pressur...

Page 99: ...ting the startup procedure make sure by checking with the system supervisor or facility safety coordinator that all safety conditions have been met Verify that no safety alarms are currently occurring and that recently recorded alarms have been properly acknowledged and addressed PROCEDURES IN THIS SECTION Tools and Materials Checklist Loading Substrates Onto a Wafer Carrier Unloading Substrates F...

Page 100: ...lot are relevant details which must be recorded 2 Open the substrate container and visually inspect each substrate prior to utilization If a substrate is visually non conforming a Return the non conforming substrate to its original container b Label the container with the following information 1 Current date 2 Technician s initials 3 Description of non conformance broken particles scratched etc c ...

Page 101: ...erly labeled and documentation completed UNLOADING SUBSTRATES FROM A WAFER CARRIER This section pertains to the handling of wafers post growth when they are transferred from the wafer carrier into packaging containers Procedure 4 13 Post growth Wafer Handling 1 Retrieve the product containers prepared in step 1 of Loading Substrates Onto a Wafer Carrier Verify that all documentation is correct bef...

Page 102: ...um wand on the edge of the wafer flat Note To prevent chipping of the SiC coating on the wafer carrier do not attempt to lift the wafer by laying the handling tool on the pocket edge and prying up 2 Lift the wafer straight up approximately 2 cm 3 Roll the tweezers 180o and slide under wafer 4 After sliding the tweezers under the wafer close the tweezers grab the wafer and lift 5 Place wafer in app...

Page 103: ...azard Management Hydrogen gas is flammable and can result in explosion The surface of the Palladium Cells can be extremely hot Use extreme caution when working on gas lines as they may be pressurized Utilize pressure gauges to assure that pressure is not present in the lines prior to maintenance Refer to the MSDS for hydrogen for flammability and explosivity data Use extreme caution when handling ...

Page 104: ...sult in damage to the membrane In particular ensure that corrosive contaminates as halogens and halides are absent from the feed gas stream Do not allow sulfur compounds or unsaturated hydrocarbons in the feed gas as these compounds will poison the surface of the palladium alloy membrane If a cell becomes partially poisoned as indicated by a drop in the hydrogen purification rate reactivation may ...

Page 105: ...ual feed valves as necessary 2 Turn the purifier On by using the Power switch on the control module front panel This will energize the temperature controller and the purifier will begin to heat to 400 C 3 Turn on the UPS by using the on off switch on the UPS This will enable proper operation of the vent valve 4 Once the displayed cell temperature stabilizes at 400 C the system is ready for operati...

Page 106: ...to activate the required mode of operation base on the state of the system Table 4 3 Normal Operating Modes for V Purge Palladium Cell ITEM CONTROL SIGNAL 1 CONTROL SIGNAL 2 DESCRIPTION Purify ON ON Hydrogen feed and outlet valves are open Nitrogen supply valve is closed Vent valve is closed Heater is on Idle Pressurized Pressurized Hydrogen feed valves are open Hydrogen outlet valve is closed Nit...

Page 107: ... be placed in the Idle mode and not shut down When the purifier is in the Idle mode the heater remains energized and the temperature of the purifier is maintained at set point the flow of purified hydrogen is stopped and only a few slpm of hydrogen continue to bleed through the feed side of the purifier to prevent an accumulation of impurities on the surface of the membrane POWER FAILURE SHUTDOWN ...

Page 108: ...the input to the Palladium Cell to allow flow from the hydrogen input 4 Allow the line pressure to bleed down to zero as indicated by the rotometers 5 Unplug the electrical connections to the Pd Cell 6 Disconnect the three VCR connections to the Pd cell 7 Remove the Pd Cell from the Gas Panel 8 Label the Palladium Cell with the pertinent information as to its origin and status 9 Transfer the Palla...

Page 109: ...ond site qualified person must be present in the building when operating the system Before initiating the startup procedure make sure by checking with the system supervisor or facility safety coordinator that all safety conditions have been met Verify that no safety alarms are currently occurring and that recently recorded alarms have been properly acknowledged and addressed PROCEDURES IN THIS SEC...

Page 110: ... are preinstalled using Itools available through a default file that a site engineer can load with Itools Caution Do not adjust the overtemperature alarms in the PID controller for the Eurotherm devices It is essential that these settings remain as preset The K465i GaN utilizes a customized version of the Eurotherm displays not shown in Figure 4 6 Figure 4 6 Standard not customized Eurotherm Displ...

Page 111: ...V signals TC and Pyro RealTemp via the two PV inputs The controller will only control using one of the two PVs depending on its configuration but will monitor both PVs continually for overtemperature conditions During shutdown conditions the Nexus system will enable and disable all power supplies via the power supply PS enable output OVER TEMPERATURE CONTROL The requirements of three hardwired int...

Page 112: ...ither PV indicates an over temperature condition the PID controller will disable the PS via the hardwired enable bit The Overtemp condition is also transmitted to the PLC via a digital Input where the PLC will disable the PSs and the Nexus computer will initiate a controlled shutdown of the tool c The Pyrometer is also hardwired into the PS enable bit If the Pyrometer measures an over temperature ...

Page 113: ... the next layer without being forced to ramp All PID tables for both of the loops are stored in the Eurotherm software Note There is additional logic for the PID to prevent wind up of inactive loops Caution When writing a recipe it is important to remember that the pyrometers can not read temperatures below 450o C Always start a recipe with a layer or layers with temperature under T C control to b...

Page 114: ...e at the process setpoint for 8 10 minutes prior to the beginning of deposition TEMPERATURE SETTINGS Caution When switching between temperature modes it is important to have a smooth transition This will prevent large spikes in power supply output when the switch occurs To avoid temperature fluctuations when changing modes determine the correct T C temperature setting that corresponds to the desir...

Page 115: ...K465i Operations and Maintenance P N 1212831 Rev C Page 4 37 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 4 9 Sample Control Mode Switch Routine ...

Page 116: ...tion to the technician responsible for operating the system a second site qualified technician must be present in the building when operating the system Before initiating the startup procedure make sure by checking with the system supervisor or facility safety coordinator that all safety conditions have been met Verify that no safety alarms are currently occurring and that recently recorded alarms...

Page 117: ...he thermocouple changes in temperature cannot be tracked instantaneously Optical pyrometers are often employed concurrently to measure wafer carrier temperatures but are not actively involved in the control process Adjustments to setpoint values based on pyrometer readings are incorporated into growth processes only after detailed analysis between runs The thermocouple setpoints required for the s...

Page 118: ...f a typical SiC coated graphite wafer carrier each pyrometer is preset to an emissivity of 0 76 During the growth runs the direct readings obtained by these pyrometers are fed back along with their setpoints from the recipe software directly to the temperature controllers Each heater zone is then quickly adjusted to drive actual surface temperature to the relevant setpoint value This control feedb...

Page 119: ...at input to the reactor in multiple zones Ramping is executed through the Nexus software similar to thermocouples with the system exhibiting improved stabilization times for reaching steady state values Unlike thermocouples setpoints PyroControl setpoints do not need to be adjusted for drift during or after growth runs This allows the user to incorporate true target temperature values into recipes...

Page 120: ... of any objects in the path of the robot Placement of object may damage the robot and the object For example do not position objects under the robot arm when it is raised when it comes back down it crashes into the object Use the threaded holes on the top flange to attach eyebolts or similar devices Genmark Automation advises that all customers connect the power of the Genmark controller to the po...

Page 121: ...ial All Rights Reserved ASSOCIATED PROCEDURES Robot Setup for K Series Systems Lot Manager Manual RECOMMENDED TOOLS AND MATERIALS Allen Wrenches Combination Wrenches or Crescent Wrench Screwdrivers Aluminum Foil Container for Loose Small Parts Cleanroom Compatible Gloves System Maintenance Logbook Step Stool ...

Page 122: ...ddition there are four safe stations allowing movement of the robot inside the Transfer Hub Figure 4 11 identifies the locations of the stations for the transfer robot Lot Manager screen image Figure 4 11 Robot Transfer System Stations Glovebox Configuration Caution There is a set order in which you must manually move from station to station Failure to follow this order can result in broken carrie...

Page 123: ...t has been pulled out for reuse and that the Safe button has been activated in Transport Module of Nexus Figure 4 12 Stop Robot Button G and g is the spindle tip located in the reactor chamber H and h is the top tray in the Transfer Hub This station is for unprocessed wafers that were transferred from the glove box and that await transfer to the reactor C and c is the lower tray in the Transfer Hu...

Page 124: ...he end effector fork is referred to as the R axis Figure 4 13 The movement of the robot platform in the vertical direction is called the Z axis A separate servomotor controls each movement axis There are three elevator motors controlling the Z axis location Figure 4 14 The robot uses encoders that are attached to the servomotors to determine its position and amount of movement Figure 4 13 Robot St...

Page 125: ...ts Z R 1o 1 000 units T MVA MVA Axis Value MVA T 1000 Moves the robot specified axis to a desired position This position is defined as an absolute coordinate of the axis This should only be done after the robot is successfully homed MTS MTS Station MTS C Moves the robot arm to the retract position for the specified station PUT PUT Station Slot Option PUT H 1 2 Executes a sequence of motions that p...

Page 126: ...gnored RST RST Station RST C This command reads the absolute value of the stroke of the specified station ROF ROF Station ROF C This command reads the offset of the specified station RRP RRP Station RRP C This command reads the absolute coordinate for the R axis of the retract position of the station specified HOM HOM This command homes the robot sensors to their zero positions or absolute positio...

Page 127: ... to compensate for the weight of the platter while the second station will always have the fork completely level Both stations have their offset and stroke set to zero An upper case letter is always used for the lower station and the lower case letter is used for the upper station the little letter sits on top of the big letter Table 4 4 K Series Robot Stations Shelf Robot Station Growth Module g ...

Page 128: ... a single station Please repeat for the remaining shelves Procedure 4 19 Setting Up Stations for the Transfer Robot 1 Turn the servomotors on by entering SVN 2 Home the robot with HOM command This must be done without a wafer carrier on the fork 3 Level robot by entering CLZ 4 Open the necessary gate valve for teaching the G or V stations only Caution When moving the robot arm manually use care to...

Page 129: ...egative value For this step T and Z axes should not be changed 13 Type SAV to save the retract position for the station to the robot s memory 14 Repeat steps 3 21 of this procedure for any remaining stations that need to be set Caution Verify that the appropriate station name is used in steps 12 and 14 Using the wrong station name will results in deleting the previously stored stations and possibl...

Page 130: ... Hub chamber use the MVR command for the T R and Z axes to move the robot arm and fork inside the Transfer Hub 5 Home the robot using the HOM command 6 Restore the working speeds using the RSA command Symptom The robot arm has crashed into the chamber wall Actions 1 Verify that the robot arm and fork are fully inside the Transfer Hub chamber If it is not use the MVR command for the T R and Z axes ...

Page 131: ...es Safety Precautions and Hazard Management In addition to the technician responsible for operating the system a second site qualified technician must be present in the building PROCEDURES IN THIS SECTION End Shift Shutdown Procedure Maintenance Shutdown Procedure Facilities Maintenance Shutdown Procedure Emergency Electrical Shutdown Procedure REFERENCE DRAWINGS The following drawings are provide...

Page 132: ...fy that the system is in the Idle state 2 Close the manual bubbler valves by first closing the inlet valves and then by closing the outlet valves For series bubblers close valves on the upstream cylinders closest to the carrier gas supply first and then close valves on the downstream cylinder Tag valves that are closed during this step 3 Verify that all temperature control baths have sufficient fl...

Page 133: ...u must be methodical when performing this procedure to ensure that each line is properly evacuated and backfilled Opening the VCR fittings under slightly positive pressure will help minimize the amount of outside contaminants introduced into the gas lines and components while they are open After the maintenance is completed refer to K465i GaN System Startup and the System Readiness Checklists for ...

Page 134: ...URCE ISOLATION LINE HYDRIDE INJECTOR MFCs 4 N2 PUSH LINE N2 PUSH INJECTOR MFCs 5 PORT PUSH LINE ALKYL INJECTOR MFCs 5 MANUAL VALVES ALKYL INJECTOR BLOCK LFA GB ISOLATION VALVES TRANSFER HUB PARTICLE FILTER ISOLATION VALVES PNEUMATIC BALL VALVE V2 THROTTLE GATE VALVE MANUAL VALVE V1 TO EXHAUST i d1 f c h k b e a g FROM H2 SOURCE REACTOR FROM N2 SOURCE PROCESS PUMPS HUB PUMP LFA GB PUMP Figure 4 16 ...

Page 135: ...the TV mode drop down menu in Nexus 8 Open the pneumatic ball valve AV 184 Generic System Diagram GSD in the Process Pump exhaust line 9 Pump down the reactor for 1 to 2 minutes after the pressure reads 0 zero Hydride Line Procedure 10 Open the pneumatic valve AV 131 between the Hydride Injector MFCs and the reactor Note there are actually 4 valves one for each MFC However Nexus shows a single val...

Page 136: ...he MFC Analog 86 in the Isolation line a 1 liter set point 36 Give the MFC Analog 87 in the Port Purge line a 1 liter set point 37 Flow N2 through the Alkyl Injector Block supply line by opening the pneumatic valve AV 129 in the Alkyl Line just before the Alkyl Injector Block and give the adjacent PC99 a 760 torr set point 38 Set the Alkyl Injector MFCs to 10 of maximum flow 39 Set the N2 Push Inj...

Page 137: ...lve AV 184 in the process pump line 49 Close all other opened pneumatic valves AV 17 AV 18 AV129 and AV 130 50 Set all MFCs to zero 51 Close the N2 gas supply valve source isolation valve MV 3 52 Verify that all toxic gas monitors have sufficient tape to provide continuous monitoring throughout the shutdown period 53 Turn off the heater filament power supplies ...

Page 138: ... is in the Idle state 4 Press the Green Stop button in Nexus This action will stop the flow of hydrogen and close all pneumatic valves 5 If the system uses a palladium cell close the palladium cell manual output valve 6 Verify that all toxic gas monitors have sufficient tape to provide continuous monitoring throughout the shutdown period 7 Turn off the heater filament power supplies 8 If the syste...

Page 139: ...riate procedures in the vacuum pump section c Close the manual valve to the inlet of the process pump Tag the valve closed d Turn off the process pump following the appropriate procedures in the vacuum pump section Caution Leave cooling water running for at least one hour after stopping the pump to cool the pump casing Take note that the casing remains very hot even after the pump is off If there ...

Page 140: ...nditions when it is necessary to disable system electrical functions and sources For most shutdown conditions it is preferable to perform a maintenance shutdown where vacuum pumps are still running and computers are still operating The emergency shutdown mode should be used only when there is a suspected problem associated with the electrical system such as a fire a possibility of electrocution or...

Page 141: ...off all pumps power supplies analogs and digitals etc Note Once safety conditions permit occupancy of the area where the system is located perform the following steps 2 If there is a Palladium Cell installed verify that there is nitrogen flowing to the Palladium Cell 3 Turn off the susceptor motor 4 Turn off the heater power supplies 5 Close the manual inlet valves to the vacuum pump Tag the valve...

Page 142: ...ns on FlowFlange and Heater maintenance The Maintenance sections of this document include Routine Maintenance and Basic Steps Reactor Chamber Maintenance Flow Flange Maintenance Heater Maintenance System Restoration Transfer Hub Chamber Maintenance Particle Filter Maintenance Bubbler and Bath Maintenance Leak Checking Gas Monitoring Decommissioning Instructions This chapter employs linked referenc...

Page 143: ... this manual These procedures should be adjusted to fit any local regulations as necessary The facility safety officer should be consulted during any procedure development Whenever maintenance is performed on the system exercise extreme caution Anyone near this equipment can raise the potential for safety incidents There are many potential hazards that could be encountered Only qualified technicia...

Page 144: ... Under no circumstance should repair or adjustment of equipment be attempted while alone The immediate presence of another trained technician capable of rendering aid is required Before making adjustments on electronic equipment be sure to protect body against grounding If possible adjustments on electrical equipment should be made with one hand with other hand free and clear of the equipment Even...

Page 145: ... time and expensive repairs Below is a basic outline of topics that should be addressed when undertaking any maintenance procedure All written maintenance procedures listed in this manual are predicated upon these concepts While the specifics of any procedure should be adjusted to fit within a particular institute s guidelines the overall principles listed here should always be adhered to Establis...

Page 146: ...ou are going to do it 3 Identify all hazards and related protective measures This includes hazards to personnel and equipment You should have a planned response to all anticipated problems 4 Gather all materials tools parts and safety equipment needed to perform the maintenance Ensure that you have all replacement parts before starting to minimize system down time 5 Prepare the system for maintena...

Page 147: ...ce or other system related functions are performed on Veeco TurboDisc systems safety procedures must be followed which includes wearing any required personnel protection equipment Safety glasses are to be worn when using methanol Cleanroom compatible gloves should be worn when performing this maintenance Disposable cleanroom sleeves should be utilized to protect arms clothing from contamination Th...

Page 148: ... 1212831 Rev C Page 5 7 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Leak Checking K465i GaN Flow Flange Maintenance K465i GaN Heater Maintenance K465i GaN System Startup ASSOCIATED DOCUMENTS Maintenance Schedule ...

Page 149: ... Aluminum Foil Flow Flange Hydraulic Lift Assembly 1 4 1 2 3 4 Ni VCR Gaskets Veeco PN 8898E01 1000404 1094021 Cleanroom Wipes Cleanroom compatible Long Q Tips cotton swab with plastic stick Container for Loose Small Parts Container to Catch any Residual Water in Cooling Lines Waste Container for Used Wipes etc System Maintenance Logbook Platform for standing on while performing maintenance large ...

Page 150: ...ng the following procedures and when handling the parts Also avoid exposing the parts to dust and debris HARDWARE MAINTENANCE KEY SWITCH NEXUS The Hardware Maintenance Key Switch is a Nexus tool that aids K465i maintenance functions Switching the key to ON blocks the start of a new process or scheduler action for CTCFlex or from the host If a process is already running the switch allows the proces...

Page 151: ...right 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 2 Chamber Maintenance Window 4 Ensure that all the power supplies are turned off use the toggle switches located on the front of the power supplies Figure 5 3 Toggle Switches on Power Supplies ...

Page 152: ... Inc Confidential All Rights Reserved 5 Turn off all the breakers in the CBA for the power supplies and ensure that they are locked out properly Figure 5 4 Power Supply Breakers Locked Out 6 As given in the screen instructions ensure that the tool is in N2 idle Figure 5 5 Mandatory Instructions ...

Page 153: ...Maintenance P N 1212831 Rev C Page 5 12 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 7 Close the manual valves for the bubblers H2 NH3 and SiH4 Figure 5 6 Manual Valves for Bubblers H2 NH3 and SiH4 ...

Page 154: ... 5 13 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 8 Click Continue Prepare Chamber for maintenance Figure 5 7 Continue Prepare Chamber for Maintenance 9 When Pump Purge is complete click Backfill Chamber Figure 5 8 Backfill Chamber ...

Page 155: ...struments Inc Confidential All Rights Reserved 10 Follow the on screen prompts to backfill the chamber Figure 5 9 Onscreen Directions Chamber Maintenance Window 11 Close each manual valve MV53 and MV54 above the Ebara pumps see Figure 5 10 Figure 5 10 Close Manual Valves MV53 and MV54 ...

Page 156: ...All Rights Reserved 12 Verify or open slowly the two manual ball valves between the particle cart and the reactor MV104 and MV105 Figure 5 11 Manual Ball Valves MV104 and MV105 13 Verify or open slowly the manual ball valve between the Main Process Vacuum Valve Isolation valve and the particle cart filter MV106 ...

Page 157: ...l Rights Reserved Figure 5 12 Manual Ball Valve MV106 14 Click Continue Backfill Chamber Figure 5 13 Continue Backfill Chamber 15 When the backfill chamber process is completed the message shown in Figure 5 14 appears in the log information screen 16 Follow the remaining instructions in the log information screen ...

Page 158: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 17 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 14 Backfill Process is Complete The Reactor is at Atmosphere ...

Page 159: ...212831 Rev C Page 5 18 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 17 Close the two manual ball valves MV104 and MV105 between the particle cart and the reactor Figure 5 15 Valves MV104 and MV105 in Closed Position ...

Page 160: ...nts Inc Confidential All Rights Reserved 18 Close the manual ball valve MV106 between the Ebara pumps and particle cart filter The reactor and particle filter are vented Figure 5 16 Valve MV106 in Closed Position 19 Gather all necessary parts and tools 20 Proceed with the Flow Flange Removal ...

Page 161: ...sure both sides of the connection are clearly labeled to aid in reassembly Procedure 5 2 Flow Flange Removal Procedure 1 Turn off all power supplies to the filament 1 Raise the shutter using Nexus software Once it is raised click Disable 2 Turn off the Adixen pump for the THA Differential seal see Figure 5 17 using the black toggle switch on the back of the pump Figure 5 17 Power to the Adixen Pum...

Page 162: ...1212831 Rev C Page 5 21 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 3 If present verify label and disconnect the cables from the top of all the pyrometer RT DRT heads Figure 5 18 Pyrometer DRT and Real Temp Cables ...

Page 163: ...Maintenance P N 1212831 Rev C Page 5 22 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 4 Turn off and disconnect flow flange alkyl line heaters Figure 5 19 Disconnecting of Alkyl Heater Wires from PDU ...

Page 164: ...opyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 5 Verify label and disconnect the numerous T C water connections on the flow flange Remove these connections from the DeviceNet T C module on the reactor cart Figure 5 20 T C on DeviceNet Module ...

Page 165: ... P N 1212831 Rev C Page 5 24 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 6 Turn off the heat exchangers supplying cooling water to the flow flange see Figure 5 21 Figure 5 21 Power for Lytron Heat Exchangers ...

Page 166: ...ontainer to collect any residual water that may drip from the lines Disconnect the cooling water lines for the flow flange at the quick disconnects rather than at the reactor cooling band junctions Figure 5 22 Flow Flange Cooling Lines 8 Disconnect the water lines at the viewport and reactor cooling band see Figure 5 22 Use a suitable container to collect any residual water that may drip from the ...

Page 167: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 26 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 23 Viewport and Reactor Band Cooling Lines ...

Page 168: ...ge 5 27 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 9 Disconnect the two CDA lines at the SMC double check block for the shutter ensuring that the lines are properly labeled prior to removal Figure 5 24 CDA Lines for the Shutter ...

Page 169: ...enance P N 1212831 Rev C Page 5 28 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 10 Disconnect the Molex connector for the shutter sensor see Figure 5 25 Figure 5 25 Molex connector for the Shutter Sensor ...

Page 170: ... Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 11 Disconnect the alkyl main hydride center purge viewport purge and reactor isolation feed gas lines to the flow flange assembly VCR see Figure 5 26 Figure 5 26 Flow Fange Assembly Gas Lines ...

Page 171: ... Maintenance P N 1212831 Rev C Page 5 30 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 12 Remove the clamps securing the flow flange assembly to the reactor see Figure 5 27 Figure 5 27 Clamp Removal ...

Page 172: ... Rights Reserved 13 Attach the hydraulic lift assembly to connections on the flow flange assembly Figure 5 28 Lift Attached to the Flow Flange Assembly Caution Prior to lifting the flow flange from the reactor verify that there are no remaining connections that would prevent safe removal of the flow flange assembly ...

Page 173: ...ow flange to ensure that it lifts evenly without bouncing 14 Carefully pull the lift assembly away from the reactor chamber 15 Using the hydraulic lift assembly raise the flow flange assembly high enough for the shutter to safely clear the top of the reactor walls Warning To avoid having the flow flange strike the top of the system frame do not raise the flow flange too high 16 Carefully pull the ...

Page 174: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 33 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 30 InSitu Monitor Over Flow Flange ...

Page 175: ... from the Reactor 1 Locate and shut down the reactor s electrical connections to the heater assembly circuit breaker power supply switch 2 Disconnect the heater power supply cables 3 Locate and disconnect the heater baseplate cooling tube connections to the baseplate 4 Disconnect the electrode cooling tubes 5 Drain all water from the heater s lines and assembly 6 Loosen and remove the cap screws o...

Page 176: ...he socket adapter and 1 5 16 socket carefully loosen and remove all six 6 of the brass nuts in a criss cross pattern Note Lift the heater assembly slowly and carefully two people to prevent damage to parts 8 Raise the heater assembly from the holes of the electrode bushings and baseplate water lines see Figure 5 106 on the reactor cart frame and place it on a clean flat surface Figure 5 32 Heater ...

Page 177: ...l and primarily it occurs below the plane of the wafer carrier Uneven deposition on the reactor wall usually indicates an imbalance in the gas flow Veeco TurboDisc recommends the taking of photographs of the chamber condition each time the reactor is opened to support system maintenance records Procedure 5 4 Reactor Chamber Cleaning Procedure Warning Aluminum dust presents a significant fire hazar...

Page 178: ...ntact with the liner for the heater assembly 4 Check all the standoffs and ceramics for damage 5 Record the general condition of the chamber and flow flange looking for any damage or other abnormal conditions Deposition should be even around the chamber wall and primarily it occurs below the plane of the wafer carrier Uneven deposition on the reactor wall usually indicates an imbalance in the gas ...

Page 179: ...Rights Reserved 6 Vacuum out the reactor chamber and all exposed surfaces using the HEPA filtered Toxic Materials Fireproof Vacuum Cleaner Ensure that the top of the exhaust ring has been vacuumed thoroughly A B Figure 5 34 A Vacuuming the chamber B HEPA Filtered Toxic Materials ESD Grounded Fireproof Vaccum Cleaner ...

Page 180: ...N 1212831 Rev C Page 5 39 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 7 Remove the exhaust ring cover and vacuum this area thoroughly Figure 5 35 Removal of Exhaust Ring Following Removal of Ring Mounting Screws ...

Page 181: ... Assembly After Removal from Reactor 9 Vacuum the bottom of the chamber paying special attention to the groove in which the liner for the heater assembly rests to ensure there is no debris left in the groove 10 Vacuum out the square exhaust ports using a smaller vacuum line which allows access to this smaller area 11 Use DRY cleanroom wipes to slowly wipe the walls of the chamber no IPA is to be u...

Page 182: ...age 5 41 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved 12 Vacuum both the front and rear view ports of the chamber slowly wipe the viewports with dry Cleanroom wipes and then vacuum once again Figure 5 37 Wiping of Front Viewport ...

Page 183: ...al All Rights Reserved Wiping the Front Viewport 13 Vacuum the transfer pass thru area wipe with a dry cleanroom wipe and vacuum again Figure 5 38 Wiping of the Pass Thru Area 14 Vacuum the bottom of the chamber 15 Use DRY Cleanroom wipes to slowly wipe the liner for the heater assembly IPA is not to be used ...

Page 184: ...e the shutter and hold the vacuum close by to catch the debris Figure 5 39 Vacuuming of the Shutter 17 Using a long q tip cotton swab on a plastic stick clean the RT DRT viewport from the bottom of the flow flange 18 Vacuum the bottom of the flow flange ensuring that the vacuum nozzle does not come in direct contact with the flow flange keep inch distance between vacuum nozzle and flange ...

Page 185: ... with the sole purpose of removing loose dust only NO IPA Figure 5 40 Wiping of Flow Flange Bottom 20 Lower the shutter and wipe the chamber walls using dry clean room wipes only No IPA 21 Raise the shutter 22 Vacuum and then slowly wipe the liner for the heater assembly using dry Cleanroom wipes No IPA 23 Reinstall the liner for heater assembly ensuring that it is seated correctly in the groove ...

Page 186: ... chamber 28 If scheduled proceed with flow flange disassembly and maintenance as described in K465i GaN Flow Flange Maintenance 29 If scheduled proceed with heater maintenance as described in the K465i GaN Heater Maintenance 30 Vacuum out the entire reactor chamber again after heater reassembly if performing heater maintenance using clean room wipes wrapped around and overlapped finger sized plast...

Page 187: ...seplate feed through ceramic pieces for cracks and imperfections and replace if needed 2 Clean all 8 feed through o ring seats 3 Align the Water Cooling Tubes with the Water Cooling Tube holes 4 Align the copper electrodes with the ceramic bushings 5 Slowly lower the heater assembly including the inner filament shown in red into the holes of the electrode bushings and baseplate water lines see Fig...

Page 188: ...6 Under the baseplate install the proper washer and brass nut on each of the copper electrodes finger tight Using the torque wrench socket adapter and 1 5 16 socket carefully tighten all six 6 of the brass nuts in a criss cross pattern to a torque value of 10 ft lbs Finish assembling the copper electrode assembly by installing the tee fitting assembly see Figure 5 110 ...

Page 189: ...pyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 43 Heater Baseplate Assembly Bottom View 7 After ensuring that the o ring is in place tighten the cap screws on the o ring retainers for each heater assembly cooling tube see Figure 5 110 ...

Page 190: ...flow flange assembly 7 Attach the clamps securing the flow flange assembly to the reactor Tighten the clamps until just snug To ensure the flange sits evenly on the reactor the flange will be pulled down tight later using the vacuum pump Once the flange is pulled down tight the clamps can be retightened 8 Using new VCR gaskets reconnect the alkyl hydride push flow injection and isolation feed gas ...

Page 191: ...ic pressure Before leak checking can be initiated the system must be restored to vacuum conditions The following set of steps places the reactor particle filters and injector block under vacuum prior to leak checking the system Refer to Figure 5 44 and the System GSD to determine the location of valves and MFCs referenced in this section Also refer to the system drawing to determine where the near...

Page 192: ...tor to the relevant leak check port 9 Pump down leak check port using the leak detector Leak check the leak detector leak detector fittings and cold trap before opening the leak check port manual valve 10 Close the manual valves before the pumps 11 Open leak check port manual valve 12 Begin helium leak testing by starting at the top of the flow top and leak checking all VCR fittings and welds 13 L...

Page 193: ... related functions are performed on Veeco TurboDisc systems safety procedures must be followed including the wearing of all required personnel protection equipment Safety glasses are to be worn when using methanol Cleanroom compatible gloves should be worn when performing this maintenance The flow flange assembly is extremely heavy Use a forklift to remove the assembly from the reactor and to supp...

Page 194: ...es Allen and Socket or Box End HEPA Filtered Toxic Materials Vacuum Cleaner Cleanroom Compatible Gloves Aluminum Foil Flow Flange Hydraulic Lift Assembly VCR gaskets 1 4 1 2 Teflon Tape Alcohol isopropanol Cleanroom Wipes Container for Loose Small Parts Container to Catch any Residual Water in Cooling Lines Waste Container for Used Wipes etc System Maintenance Logbook ...

Page 195: ...y drawings are available for reference during this procedure to aid in the disassembly of the flow flange and lift assembly Due to the weight of the shutter ensure that the Flow Flange Assembly are on a solid clean surface prior to attempting removal of the shutter 1 Vacuum all exposed underside surfaces of the flow flange After vacuuming once wipe surfaces with a dry clean room wipe and vacuum ag...

Page 196: ...ed Figure 5 45 Flow Flange Tubing and Water Connections Procedure 5 8 Shutter Removal Note The initial state for Automatic Restoration Procedure is The system has been fully reassembled Valves 104 105 106 53 and 54 are all closed see Figure 5 46 The Reactor Chamber is at atmosphere The Particle Filter is at atmospheric pressure ...

Page 197: ...Page 5 56 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 46 Exhaust Line Flow Diagram 1 From the Chamber Maintenance screen select the Vacuum chamber for leak check option The Chamber Maintenance Leak Check window appears ...

Page 198: ...pyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 47 Chamber Maintenance Vacuum Chamber for Leak Check The log information windows appear Figure 5 48 and Figure 5 49 Figure 5 48 Chamber Maintenance Vacuum Chamber for Leak Check First View ...

Page 199: ...m Chamber for Leak Check Second View Scrolling 2 The tool automatically goes into Shutdown mode Close the Main Process Vacuum Valve and change the TGV position to zero closed 3 Open each manual valve above the Ebara pumps see Figure 5 50 MV53 and MV54 Figure 5 50 Opening of Manual Valves MV53 and MV54 4 Open the outlet manual valve MV 106 of the particle filter slowly ...

Page 200: ... Confidential All Rights Reserved Figure 5 51 Opening of MV106 5 Slowly open the two manual ball valves between the particle cart and the reactor MV104 and MV105 Figure 5 52 Manual Ball Valves MV104 and MV105 6 After completing through step 6 click on Continue The Log Information window see appears ...

Page 201: ...ts Inc Confidential All Rights Reserved Figure 5 53 Continue Vacuum Chamber for Leak Check Figure 5 54 Log Information Visible After Clicking on Continue 7 The chamber automatically pumps down and the screen shown in Figure 5 55 appears indicating that the chamber is ready to be leak checked ...

Page 202: ...served Figure 5 55 Chamber Ready for Leak Checking 8 Close each manual valve MV53 and MV54 above the Ebara pumps see Figure 5 56 The system is ready to be leak checked Follow sections 5 74 and 5 109 in the K465i GaN Operations and Maintenance CD for leak checking procedures Figure 5 56 Closing of Manual Valves MV53 and MV54 ...

Page 203: ...water lines from the top of the assembly 2 Remove the retaining ring flanges and retaining rings from each cooling water line 3 Rotate the flow flange assembly on the flow flange lift 180º to allow access to the bottom side of the flow flange Figure 5 57 Figure 5 57 Bottom of Flow Flange 4 Loosen and remove the vented screws 16 total securing the confined inlet donut to the flow flange weldment ...

Page 204: ...y will hold the cold plate in place when the Flow Flange is rotated 180 degrees 7 Rotate Flow Flange 180 degrees so that it is right side up 8 Lower the Flow Flange onto two parallel supports with the two screws between the supports and the Flow Flange supported on the supports 9 Remove the two screws 10 Raise the Flow Flange to remove the cold plate 11 To remove the gas screen from the coldplate ...

Page 205: ...ings are positioned to the sides of the grooves and not on the top surface as it might affect the seal quality and present a risk for leaks 4 Place a Viewport Glass in each pocket of the Viewport Adapter 5 Place Viewport Cover upside down on a clean room safe cardboard then insert the 2 o rings and then the single o ring Make sure to position the seams of the o rings to the side so as not to prese...

Page 206: ...unting Holes 7 Using the fork lift place the Flow Flange on a clean room safe cardboard 8 Wet a Tex wipe with propanol then proceed to clean the o ring grooves on the Flow Flange FF Figure 5 60 Cleaning of O Ring Grooves on Flow Flange 9 Lay out all o rings to be used on a large piece of clean UHV aluminum foil then clean each one with a Tex wipe and propanol ...

Page 207: ...swab then apply the Fomblin on the o rings Take care not to apply too much Fomblin leaving only a very thin film Figure 5 62 Fomblin on O Rings 11 Take note of the seams on the o rings and make sure to position them to run along the sides during the o ring installation The seams must not be in a position to run along the top nor bottom surfaces as this would increase the risk of leakage Install o ...

Page 208: ...ngs 12 With propanol and Tex wipe clean the bottom surface of the Viewport Assembly consisting of Viewport Cover and Viewport Adapter Figure 5 64 Viewport Adapter Cleaning 13 Take note of the direction of the two glands on the side of the Viewport Adapter and position them so that they face the same side as the front of the Flow Flange marked F on top of the FF ...

Page 209: ...lands 14 Secure the Viewport Adapter using 16 Silver plated SHCS 10 32 x 1 5 onto the FF using a torque wrench set at 90 in lbs at the sequence shown below Figure 5 66 Viewport Securing 15 Prepare the FF forklift by ensuring that the retaining pins are in the outside position and align the retaining pins on the fork arms with the retaining holes on the FF lifting brackets ...

Page 210: ...erved Figure 5 67 Forklift Preparation 16 Insert retaining pins into the holes on block making sure that the pins are fully inserted before lifting the FF Figure 5 68 Retaining Rings and Forklift 17 Lift FF to approximately 3 from the floor and install leak check fitting on the VCR gland as shown below on the Viewport Adapter ...

Page 211: ...k along the interfaces between the Viewport Glass and the Viewport Viewport and Viewport Adapter and the Viewport Adapter and the FF Figure 5 70 Leak Checking of Viewport 19 When the assembly has been determined to be leak free release the outer pins on both sides of the forklift as shown below then with the aid of another technician flip the FF upside down Secure the FF by reinserting the retaini...

Page 212: ...e 5 71 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 71 Releasing of Pins Inverting of Flow Flange 20 Wipe all bottom surfaces with Tex wipe and propanol then install 10 spacers within the counterbored holes indicated below ...

Page 213: ...nc Confidential All Rights Reserved Procedure 5 11 Manifold Cold Plate Assembly Figure 5 72 Placement of Manifolds 1 Carefully place the two Hydride Manifolds on the FF taking care not to topple the spacers underneath 2 Screw down the Hydride Manifolds using 10 SHCS 8 32 x 3 8 and 10 SHCS 8 32 x ...

Page 214: ...Figure 5 73 Manifolds Placement 3 Leave the FF assembly on the lift while you prepare the Cold Plate assembly for installation 4 Prepare the Cold Plate assembly by placing the Cold Plate on a clean room approved surface such as UHV foil or Tex wipes with the aid of another person Clean the top surfaces using a Tex wipe and propanol ...

Page 215: ...4 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 74 Tin Foil Preparation Figure 5 75 Wiping Surface Clean 5 For Cold Plate designs that require Alkyl Plugs follow MI 1201582 for installation of the Alkyl Plugs into the Cold Plate ...

Page 216: ...alled Remove all raised edges carefully using a clean sharp blade After burr removal blow the area clean using filtered N2 gas to remove particles generated Figure 5 76 Scraping of Metal Surface Procedure 5 12 Screen Retainer and Gasket Installation Parts for Installation Alkyl plugs for Cold Plate without preset alkyl spacing Refer to MI 1201582 for procedure for installing alkyl plugs Quad cut s...

Page 217: ...ts Reserved Figure 5 77 Installation of Guide Screws as per ViewPort Cutout Note The screens used are only 0 012 0 3 mm thick and must be handled carefully Always hold screen at the left and right of the viewport cutout Do not allow the screen to fold in parallel with the cutouts as creases folds may form in the screen ...

Page 218: ...crews 7 Make the guide screws align the screen so that all holes and bridges are coincident with the tapped holes and bridges on the cold plate respectively 8 Visually check the screen for any scratches folds and other surface blemishes Clean with IPA and clean room wipe if necessary Note The screen DOES NOT always sit flat on the cold plate Spring Spacers 9 Install the spring spacer on top of the...

Page 219: ...ers 11 Place the retainers on the spring spacers so that the guide screws enter the corresponding thru hole on the retainer 12 All the bridges and holes should align the same as the spring spacer screen and cold plate 13 Reinstall the 2 56 screws in the cold plate but do not tighten them completely Only install with one full turn Components in order from bottom Cold plate screen spring spacer reta...

Page 220: ...l the bridges and holes should align the same as the spring spacer screen and cold plate 15 Reinstall the 2 56 screws in the cold plate but do not tighten them completely Only install with one full turn Components in order from bottom Cold plate screen spring spacer retainer 16 Remove the four guide screws and replace with 2 56 socket head screw Note Use the following pattern to tighten the 2 56 s...

Page 221: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 80 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 81 Screw Application Pattern ...

Page 222: ... of retainer next to the screw side closer to the centerline and or viewport cutout in the picture screw See below Figure 5 82 Applying Pressure Close to Center Note In installation the spring spacer will keep positive pressure on the screen even if the retainer is not sitting flat It is common to see the retainer raised at the edges and along the two shortest rows ...

Page 223: ...83 Retainer and Spring Contact Gasket Cold Plate Flow Flange Notes The gasket is only 0 003 thick and needs to be installed by two people to minimize folding and creasing during installation The gasket does not sit flat when placed on a flat surface A crease is located approximately midway between the outer and inner diameter of the gasket ...

Page 224: ... a pin with a corresponding slot on the cold plate Install the two small thru holes pictured above near the pin The pin will go thru one of these two holes 19 Using two people lift the gasket above cold plate align the shutter cutouts on the gasket and cold plate check that the cold plate s water tubes are aligned with the gasket s holes and lower the gasket onto the cold plate ...

Page 225: ...ed onto the cold plate Support the areas near the shutter cutouts to prevent bending as shown below Figure 5 85 Leveling and Support of Gasket During Lowering Note The gasket will NOT sit flat when it is installed on the cold plate 20 With completion of the screen and gasket installation flip the CP upside down 21 Install a 20 lifting loop on each side of the CP as shown ...

Page 226: ...g Loops 22 Lower the FF assembly that is on the forklift to knee level Then with the aid of another person lift the CP assembly by the lifting hooks match the notches and the tubes on the CP with the holes on the FF assembly and slowly lower the CP assembly on the FF assembly Once the CP has been fully lowered onto the FF assembly remove the two lifting loops ...

Page 227: ...Inc Confidential All Rights Reserved Figure 5 87 Lowering of Cold Plate onto Flow Flange 23 Match the four tubes on the CFI Weldment tubes with the four largest holes on the CP and the c bored holes on the CFI Weldment with the thru holes on the CP then slowly lower the CFI Weldment onto the CP ...

Page 228: ...CFI Weldment into Cold Plate 24 Screw down the CFI Weldment using Silver plated 20 SHCS Figure 5 89 Fastening CFI Weldment 25 Wipe down the CFI and the Shutter with Tex wipe and Propanol then flip the FF Assembly right side up Next position the FF Assembly over the Shutter taking care to match the Shutter tubes to the holes on the FF Assembly ...

Page 229: ... 5 88 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 90 Lowering Flow Flange Assembly onto Shutter 26 Slowly lower the FF Assembly on the Shutter until the FF Assembly rests on the Shutter then remove the forklift attachments ...

Page 230: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 89 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 91 Flow Flange Assembly Lowered onto the Shutter ...

Page 231: ...eserved 27 Drop a spacer on each of the Shutter tubes Figure 5 92 Shutter Tube Spacer 28 Wipe down the surfaces around the o ring with Tex wipe and then using a screwdriver that is protected by a Tex wipe align the Shutter tubes with the holes on the FF Figure 5 93 Wiping O Ring Surfaces Aligning Shutter Tubes with FF Holes ...

Page 232: ...rved 29 Wipe down the bottom of the shutter tube bellows flange then slowly lower one on each of the Shutter tubes Figure 5 94 Cleaning and Assembling Lower Bellows Flange 30 Next lower the base on each of the Shutter tubes making sure that the thru holes line match the tapped holes Secure the base using six 10 32 x 1 1 2 SHCS ...

Page 233: ...curing the Shutter Base 31 Install o ring and o ring shield on each of the Shutter tubes and push both down as far as they will go Figure 5 96 Setting O Ring and O Ring Shield 32 Place air cylinder on each of the bases with the air ports facing on the left then using four 10 32 x 7 8 SHCS and anti seize on the threads secure the air cylinders on the base ...

Page 234: ...age 5 93 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 97 Air Cylinder Assembly 33 Using a 3 8 24 SHCS insert into the air cylinder rod then pull the rod into its full extension Figure 5 98 O ring and O ring Cap Assembly ...

Page 235: ...eserved 34 On each of the CFI tubes going through the FF Assembly first install an o ring then an o ring cap then secure the cap using 8 32 x 5 8 SHCS Figure 5 99 O Ring and O Ring Caps 35 Install O ring Press Shutter Lift over each Shutter tube then tighten with adjustable wrench taking care not to twist the bellows below ...

Page 236: ...ev C Page 5 95 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 100 O Ring Press Shutter Lift and Tightening 36 Place washer over the cylinder piston then place bar Secure using a 3 8 24 x 1 75 SHCS and another washer ...

Page 237: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 96 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 101 Washer and Block Assembly ...

Page 238: ...eserved 37 On each of the shutter tubes insert a washer then 2 brass hex nuts Tighten the lower nut first then lock it using the upper brass nut Figure 5 102 Air Hoses Installed into Quick Connect Ports 38 Install the air hoses into quick connect ports Figure 5 103 Flow Flange Assembly Placed Aside Prepared for RCA Assembly ...

Page 239: ... Management In addition to the technician responsible for performing the maintenance a second site qualified technician must be present in the FAB during the maintenance procedure Whenever maintenance or other system related functions are performed on Veeco TurboDisc systems safety procedures must be followed including the wearing of all required personnel protection equipment An electrical shock ...

Page 240: ...INGS The following drawings are provided to assist in the performance of the procedures contained in this section Reference Drawings List System Footprint Gas Schematic Diagram GSD Heater Assembly ASSOCIATED PROCEDURES K465i GaN Reactor Chamber Maintenance Leak Checking K465i GaN Flow Flange Maintenance ASSOCIATED DOCUMENTS Maintenance Schedule ...

Page 241: ...able Cleanroom Sleeves Wrenches Allen and Socket or Box End Blade Screwdrivers Adjustable Wrench Aluminum Foil HEPA Filtered Toxic Materials Vacuum Cleaner Alcohol isopropanol or methanol Cleanroom Wipes Container for Loose Small Parts Boron Nitride Replacement Parts Waste Container for Used Wipes etc System Maintenance Logbook 0 in lbs 50 in lbs torque wrench Torque screwdrivers 5 8 crowsfoot wre...

Page 242: ...nd when handling the parts Also avoid exposing the parts to dust and debris Maintenance of the Heater Assembly includes the following Removal of Previously Installed Heater Replacement Heater Assembly Installation Filament Installation Filament Calibration with Algorithm Maintenance of Filament only includes the following Removal of Previously Installed Filament s Replacement Filament s Installati...

Page 243: ...e and removal reinstallation of filaments may be performed without removing the heater assembly from the growth chamber Figure 5 104 Heater Assembly Caution Components may have deposition on them from growth runs Use care when removing them to prevent damage Boron Nitride ceramic parts are brittle Have replacement parts available before beginning heater disassembly to minimize system down time Bor...

Page 244: ...the Reactor 1 Locate and shut down the reactor s electrical connections to the heater assembly circuit breaker power supply switch 2 Disconnect the heater power supply cables 3 Locate and disconnect the heater baseplate cooling tube connections to the baseplate 4 Disconnect the electrode cooling tubes 5 Drain all water from the heater s lines and assembly 6 Loosen and remove the cap screws on the ...

Page 245: ... water lines see Figure 5 106 on the reactor cart frame and place it on a clean flat surface Figure 5 106 Heater Baseplate Assembly Outer Filament Removal 9 Loosen the screws connecting the outer filament to the flexible electrode while securing the outer filament with one hand preventing it from twisting with the socket driver and the flat head bit Then loosen the two screws connecting the outer ...

Page 246: ...flexible electrode Remove the remaining two screws from the non flexible electrode 13 Remove the Tungsten screws and remove the clamps from the connector ends see Figure 5 107 14 With the torque screwdriver and flat head bit while holding the flexible electrode to prevent twisting remove the two screws connecting the middle filament to the flexible electrode see Figure 5 106 Remove the remaining t...

Page 247: ... wire supports for the outer filament and replace them with wire supports from the Filament Replacement Kit 20 Remove and inspect each wire support for the middle filament and replace damaged or all wire supports with wire supports from the Filament Replacement Kit INSTALLATION OF REPLACEMENT HEATER ASSEMBLY Heater Installation 21 Remove the heater assembly from the shipping container and install ...

Page 248: ... 25 Under the baseplate install the proper washer and brass nut on each of the copper electrodes finger tight Using the torque wrench socket adapter and 1 5 16 socket carefully tighten all six 6 of the brass nuts in a criss cross pattern to a torque value of 10 ft lbs Finish assembling the copper electrode assembly by installing the tee fitting assembly see Figure 5 110 ...

Page 249: ...ter cooled baseplate counterbores Installing the Insulation Blocks 28 After inserting the ceramic cups for wire supports in the heatshield openings install the middle and outer filament insulation blocks see Figure 5 111 a Place the insulation block see Figure 5 111A on the surface of the heat shield near the outer electrode pair The two holes should be aligned with the two ceramic cups with the s...

Page 250: ...c Confidential All Rights Reserved Figure 5 111 Installations of Insulation Blocks Note Install insulation blocks on the heat shield surface Figure 5 111 block is placed near the outer electrodes Figure 5 111 insulation blocks and insulation tube are assembled and placed about the middle electrodes ...

Page 251: ...Inc Confidential All Rights Reserved MIDDLE AND OUTER FILAMENT REPLACEMENTS INSTALLATIONS Note Prior to installation of middle and outer filaments ensure that the filaments are placed with their coated darker sides facing up see Figure 5 112 A B Figure 5 112 Coated A and Uncoated B Filament Sides ...

Page 252: ...uld be aligned with the two ceramic cups with the stepped face pointing upward b Preassemble the insulation blocks and supports see Figure 5 113B by inserting the insulation tube into the holes of the blocks Place it on the heat shield surface spanning the hole in the shield with the tube between the middle electrodes and the two holes aligned with the ceramic cups see Figure 5 113B Note Install i...

Page 253: ...he filament is not concentric with the baseplate in the front to back direction looking from the electrodes end Ensure that the edges of the filament connector ends are flush with the edges of the electrodes 33 Using the torque screwdriver and the flat head bit gradually tighten all the screws for the Middle filament until a torque value of 10 in lbs is reached for each screw First tighten the scr...

Page 254: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 113 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 114 Clamps and Screws for the Outer Filament Installed ...

Page 255: ...ations and Maintenance P N 1212831 Rev C Page 5 114 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Note The final assembly resembles that shown in Figure 5 115 Figure 5 115 Heater Assembly ...

Page 256: ...G After completing any required maintenance on the reactor transfer hub assembly or particle filters much of the system will be at atmospheric pressure Before leak checking can be initiated the system must be restored to vacuum conditions The following set of steps places the reactor particle filters and injector block under vacuum prior to leak checking the system Refer to Figure 5 116 and the Sy...

Page 257: ...ant leak check port 9 Pump down leak check port using the leak detector Leak check the leak detector leak detector fittings and cold trap before opening the leak check port manual valve 10 Close the manual valves before the pumps 11 Open leak check port manual valve 12 Begin helium leak testing by starting at the top of the flow top and leak checking all VCR fittings and welds 13 Leak check all co...

Page 258: ...ion Note The Transfer Housing Assembly includes the frame and electronics surrounding the transfer hub cart The Wafer Handling Assembly WHA includes the frame for the THA LFA optional Glovebox and the PEA This section covers maintenance to the Transfer Hub chamber for the K465i GaN system It includes disassembly cleaning and reassembly of the Transfer Hub chamber An additional referenced document ...

Page 259: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 118 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 118 Transfer Hub Chamber ...

Page 260: ... protection equipment Safety glasses are to be worn when using methanol or isopropanol Cleanroom compatible gloves should be worn when performing this maintenance Disposable clean room sleeves should be utilized to protect arms clothing from contamination PROCEDURES IN THIS SECTION Recommended Tools and Materials Cleaning Procedure Leak Checking the Transfer Hub Chamber REFERENCE DRAWINGS The foll...

Page 261: ...MENDED TOOLS AND MATERIALS Wrenches Allen and Socket or Box End HEPA Filtered Toxic Materials Vacuum Cleaner Cleanroom Compatible Gloves Disposable Cleanroom sleeves Alcohol isopropanol Cleanroom Wipes Container for Loose Small Parts Waste Container for Used Wipes etc System Maintenance Logbook Step Stool Figure 5 119 Upper THA with LFA ...

Page 262: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 121 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 120 Transfer Hub Component Illustration with Glovebox ...

Page 263: ...2 4 Once pressure reaches atmospheric close the pneumatic isolation valve 5 Press the Robot Stop button to remove power from the arm during maintenance 6 Remove top of Transfer Hub do not disturb the O ring Note To avoid accidental removal of the Transfer Hub O ring remove the upper flange section carefully 7 Don personal protective equipment Ensure that new set of clean gloves are worn prior to i...

Page 264: ...Chamber and any associated pumps 3 Close all valves in any line leading into the Transfer Hub Chamber 4 Make sure the leak detector is calibrated for helium or the gas being used for leak checking 5 Attach leak detector to leak check port and pump down the leak check port 6 Put the leak detector in run or operate mode 7 Leak check leak detector connection before opening the leak check port manual ...

Page 265: ...nce and adjustment is a brief introduction to the detailed steps needed for these tasks See Robot Setup on Veeco K Systems for additional guidance Figure 5 121 Alignment of the Robot Procedure 5 17 Aligning the Robot 1 From the home position move the arm up one inch and bring it forward until the holes overlap 2 Check the alignment of the holes If they are misaligned side to side adjust the alignm...

Page 266: ...djustment of the Fork Adjusting the Fork Alignment To execute a coarse ajustment of the fork alignment loosen the set screw on the pulley and move the fork to the correct position by hand then retightening the set screw To execute a fine ajustment of the fork alignment loosen the tensioning nut on one side and tighten the nut on the opposite side ...

Page 267: ...onfidential All Rights Reserved Figure 5 123 Cable Pulley Adjustment Procedure 5 18 Cable Pulley Adjustment 1 Loosen the locknut 2 While holding the stud turn the tensioning nut to adjust the tension 3 After the desired tension and alignment are achieved tighten the locknut against the tensioning nut ...

Page 268: ...nt body suit 5 pounds of sand Steel drum Class D fire extinguisher Hazardous materials ESD grounded Vacuum cleaner certified for use in class II group E and group F Safety Precautions and Hazard Management Safety glasses must be worn at all times Caution must be exercised at all times when working around the tool Only trained and qualified persons should be performing these tasks Follow all proced...

Page 269: ...oration Procedure The system has been fully reassembled Valves 104 105 106 184 52 53 and 54 are all closed see Figure 5 124 The Reactor Chamber is at atmosphere The Particle Filter is at atmospheric pressure or slightly below 5 torr to 10 torr with purified N2 N2 flow is done offline 1 Open valves 104 105 106 and 184 see Figure 5 124 2 Place the throttle valve TGV in manual mode to position contro...

Page 270: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 129 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 124 Exhaust Line Diagram ...

Page 271: ...down 3 At the end of the maintenance procedure feed lines growth chamber load lock particle filters exhaust housing up to the process pump isolation valve should be filled with N2 at the pressure of local atmosphere Removing the Particle Filter Assembly Warning You must wear personal protective clothing and respirator to carry out the remaining steps of this procedure 4 Close the ball valves in th...

Page 272: ...n ball valves and remove the particle filter assembly as in standard particle filter maintenance see Figure 5 125 Particle Filter Maintenance 7 Move the filter assembly to a ventilated work area isolated from other personnel 8 Prepare the work area with fire suppressive measures and the filter disposal steel drum 9 Secure the locking feet such that no contact can be made between a cart wheel and t...

Page 273: ...intenance P N 1212831 Rev C Page 5 132 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 126 Particle Filter Cart Feet in Locked Position 10 Remove the strap from the housing body see Figure 5 127 ...

Page 274: ...012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 127 Body Strap for Particle Filter Green Highlight 11 This step requires two people With the first person holding the base to the multi stage filter the second person removes the neck collar see Figure 5 128 ...

Page 275: ...lter maintenance you may opt to use the oxidation valve at the bottom of the filter housing If deciding against this option skip to Step 14 of this procedure To utilize the option connect the N2 Air source at a 0 97 0 03 ratio at 5 PSI to the valve Open the oxidation valve slowly Once fully open open the filter outlet ball valve slowly to a vented housing that will cover the KF40 fitting Allow slo...

Page 276: ...e P N 1212831 Rev C Page 5 135 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 129 Oxidation Valve Figure 5 130 A Canister with Cap B Canister Stages Baffle Bottom C Filter Insert D Stage 1 Disassembly ...

Page 277: ...ents Inc Confidential All Rights Reserved Figure 5 131 Outlet ISO160 Reducer Housing Outlet 13 Loosen the belly band see Figure 5 133 until it can be removed from the filter body of the particle filter housing and lift the housing cap piece see Figure 5 132 Figure 5 132 Housing Cap see Arrow ...

Page 278: ... of a fire or flare up replace the reducer on the canister body to starve the reaction of oxygen Repeat this process until all reactions have ceased Figure 5 133 Particle Filter Housing Cap Removed 14 Using the handle see Figure 5 133 lift the filter stage out of the housing and place the assembly onto a table or maintenance area see also Figure 5 130 Figure 5 134 Removed Filter ...

Page 279: ...he assembly onto a table or maintenance area 18 Using a wipe and ESD the approved vacuum cleaner loosen the particles from all stainless steel surfaces and vacuum them without making contact with stainless steel 19 Loosen the belly band below the second stage until it can be removed from the filter body of the particle filter housing Lift the housing piece Warning Watch for fire or flare ups The f...

Page 280: ...ch the O ring Place the belly band around the O ring and over the two protruding flanges Tighten it with a wrench 30 Clean the outlet reducer see Figure 5 129 and using a new O ring place the outlet reducer on the outlet flange of the particle filter housing 31 Place claw clamps evenly around the flange seals and tighten them in a star pattern 32 This step requires two people Raise the filter back...

Page 281: ...l sealing surfaces are clean and free of particulate 38 Install the large MassVac filter on the insert 39 Walk the filter down the insert by rotating it left and right with slight downward pressure 40 Verify that the filter sits flush against the insert base Figure 5 137 Filter and Insert 41 Install the stainless steel top plate supplied with the insert Next install baffle plate The baffle plate i...

Page 282: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 141 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 138 Gen 3 Filter Assembly with Baffle Plate Bottom View ...

Page 283: ... all sealing surfaces are clean and free of particulate 44 Install the large MassVac filter on the insert 45 Walk the filter down the insert by rotating it left and right with slight downward pressure 46 Verify that the filter sits flush against the insert base 47 Tighten the stainless steel top plate using the provided locknuts Tighten the two locknuts hand tight Do not use a tool Set aside the t...

Page 284: ...right 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 140 Filter and Insert into Outer Housing 50 Clean the new o ring with IPA and place the new o ring on the outer lip of the particle filter body immediately above the second stage outer housing ...

Page 285: ...ing body on top of the second stage outer housing body 52 Ensure that there is a good fit and that both surfaces touch the o ring 53 Place the belly band around the o ring and over the two protruding flanges and tighten with a 7 16 nut driver 54 Install the new third stage filter assembly insert and large particle filter as shown below Verify the new filter assembly sits flush with the outer housi...

Page 286: ...r 57 This step requires two people Raise the filter back into the cart and secure the strap 58 Replace the neck collar 59 Raise the locking feet such that the wheels can touch the floor and the assembly can be moved Connecting the New Particle Filter Assembly Note Every KF 40 connection requires a centering ring assembly Centering ring assemblies are provided with the kit some are reused from the ...

Page 287: ...o minutes close the valve 74 Place the system in Idle by performing the Startup Following a Maintenance Shutdown procedure located in Operations MaxBright GaN System Startup and K465i GaN System Startup section Note It is recommended that a thorough Reactor Chamber Bake out is performed prior to utilizing the system for product growth runs after this procedure is performed Dispose of all hazardous...

Page 288: ...ter housing by spraying helium around the particle filter front plate to ensure that the seals are tight Refer to the procedures in Section 16 Leak Checking for further details 10 Close off the leak check port manual valve remove leak detector and cap leak check port 11 Re open the Ebara s with the manual isolation valve 12 Remove any air between the leak check port manual valve and the cap by ope...

Page 289: ... container upon removal from the system Then place all of the hazardous materials the spent filter soiled wipes etc into clear ziplock bags Identify the bagged materials with the proper identification indicate material date initials etc A tag or label may be utilized just assure that it is securely fastened to the bag 2 Dispose of the hazardous material in accordance with facility procedures and t...

Page 290: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 149 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved ...

Page 291: ...pment Most alkyl bubblers are highly pyrophoric therefore exercise extreme caution when handling the bubblers All bubblers must always be handled in a vertical position with the valves facing upward Before initiating the startup procedure make sure by checking with the system supervisor or facility safety coordinator that all safety conditions have been met Verify that no safety alarms are current...

Page 292: ... 8 wrenches Helium leak detector Liquid Nitrogen for He Leak Detector He tank with spray hose Heat gun Fireproof Gloves Faceshield Clean Room Gloves One pack of 10 1 4 VCR nickel gaskets Two 1 4 male VCR caps New Bubbler Scale to Weigh Bubblers System Maintenance Logbook Rubber chemical gloves for use when handling or exposed to while not limited to bubblers or bath Glycol ...

Page 293: ...ew bubbler typically requires a few hours to reach thermal equilibrium with the temperature of the bath Running the system immediately after a bubbler change may result in uncontrollable material flux and is not recommended Procedure 5 22 Bubbler Replacement 1 Open a maintenance log for the system and record the necessary detailed information 2 Put the system in the idle state 3 Go to Nexus mainte...

Page 294: ...t a leak exists Cap the legs using the male VCR caps 15 Weigh the new bubbler logging the pertinent information prior to its installation Caution When removing caps from the new bubbler if powder or smoke are evident DO NOT install the bubbler Caution Make sure that the bubbler is connected to the appropriate inlet and outlets Connecting the bubbler backwards can result in contamination of the alk...

Page 295: ... Spray Helium around the bubbler VCR fittings make sure that the new bubbler legs are leak tight If Helium is detected by the leak detector then tighten the VCR fittings and re leak check 28 Close the leak check valve on the vacuum trunk line and disconnect the leak detector from the system 29 Click Continue in the displayed dialog box when the leak check is completed successfully 30 The system wi...

Page 296: ...ity procedures following the environmental regulations governing your municipality state province or country Note A new bubbler typically requires a few hours to reach thermal equilibrium with the temperature of the bath Running the system immediately after a bubbler change may result in uncontrollable material flux and is not recommended Figure 5 144 Generic Bubbler Maintenance Diagram ...

Page 297: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 156 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 145 Bubbler Network and Bath ...

Page 298: ...h bath for proper composition and adjust as needed Procedure 5 23 Bath Initial Fill and Volume Adjustment 1 Fill the bath to the proper level between the fill lines designated by the manufacturer with a water glycol mixture 50 50 targeted at a freezing point of 40 F 10 Warning Glycol is toxic Ensure that no person food surfaces or drink comes in contact with Glycol 2 Turn the bath On and set to th...

Page 299: ...liquid in the bath utilizing the indicator 2 Adjust the level to the fill line of the bath Add water to raise the freezing point of the liquid add glycol to lower the freezing point or add both water and glycol 50 50 to maintain the freezing point Note If the composition needs to be adjusted and there is not enough room in the bath then remove some of the liquid and dispose of it as hazardous wast...

Page 300: ...tamination from a leak detector when connecting it to a system an isolation valve must always be used on leak detectors Bring the leak detector under vacuum before exposing it to the system An external cold trap should be used especially after material has been grown in a system This assists in preventing the leak detector from being contaminated Heavy contamination will lead to the leak detector ...

Page 301: ...of the Process Pump REFERENCE DRAWINGS The following drawings are provided to assist in the performance of the procedures contained in this section Reference Drawings List System Footprint Gas Schematic Diagram GSD RECOMMENDED TOOLS AND MATERIALS Wrenches Allen and Socket or Box End Helium He Leak Detector with LN2 Dewar He Tank with Spray Hose Methanol Solution of Soap in Water Liquid Nitrogen fo...

Page 302: ... not provided Instead the information presented is intended to assist technicians in developing a methodology for leak testing This methodology should be applied every time any part of the system requires leak checking Successful leak testing requires careful methodical work Following an organized sequence of steps helps locate leaks with a minimum of confusion Take your time Work sequentially Hav...

Page 303: ...es will appear indicating the location of the leak For highly sensitive leaks use a low flow spray of Helium He into a beaker of water and turn the He down until there are 1 to 2 bubbles per second Some leaks are very slow responding because the He must follow a complex path to get to the leak detector An example is a leak in a thermocouple The He must first diffuse through an epoxy membrane These...

Page 304: ...ugh the system is always maintained Backflows through the particle filter into the reactor can cause reactor contamination and system degradation and should be avoided Calibrate the leak detector following the user s manual that accompanies the particular leak detector being used Make sure that the leak detector is calibrated for helium or the gas being used to leak check Connect the leak detector...

Page 305: ... the first closed valve If the leak detector does not display a reading outside of the accepted range then proceed the with leak checking 2 If the leak detector senses helium at an unacceptable level then visually inspect the area of line being tested for any pin holes or loose fittings If a pin hole is located in the actual plumbing line i e not at a weldment VCR fitting joint valve or it cannot ...

Page 306: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 165 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 146 VCR Fitting ...

Page 307: ...ew one Note that this will require welding and either a qualified welder should perform the work or call Veeco Compound Semiconductor at 1 8TURBODISC VALVES In general all valves pneumatic needle and manual are leak checked in the same manner however mitigating a leak depends on which type of valve has the leak Note This check is for an external leak not an internal leak All pneumatic and manual v...

Page 308: ...mpt to mitigate a leaking valve Needle Valves 7 Using a wrench tighten the nut associated with the needle valve and then re check the valve for a leak If the valve now passes the leak check proceed to the next fixture and leak check it accordingly 8 If a leak is still present after tightening the bolt remove the valve from the plumbing line and reassemble the valve using the same gasket Manual Val...

Page 309: ...ium around the body of the MFC 3 If a leak is detected refer to the above VCR section for mitigating the leak If checking the VCR fitting does not mitigate the leak check the o ring and replace as necessary on elastomer sealed MFC s Procedure 5 31 Leak Checking a Pressure Controller Note Always leak check pressure controllers from both sides that is with the leak detector hooked up to each side in...

Page 310: ... remove the welded pieces from the system and have a qualified person re weld where the suspected leak is or call Veeco TurboDisc Operations at 1 8TURBODISC Procedure 5 33 Leak Checking KF40 ISO 80 100 Lines 1 Spay helium at every flanged KF40 seal all the way around the gasket 2 If a leak is detected remove the gasket and clean it with methanol and grease it with Fomblin vacuum grease Reassemble ...

Page 311: ...a second site qualified technician must be present in the FAB during the maintenance procedure Whenever maintenance or other system related functions are performed on Veeco TurboDisc systems safety procedures must be followed including the wearing of all required personnel protection equipment A 4 or higher concentration of hydrogen in the air is flammable The test or span gas typically used to ca...

Page 312: ...eserved HYDROGEN DETECTION SYSTEM The hydrogen detection system standard is the Scott Instruments Sentinel 6 7600 For information on the use and installation of this gas detector refer to the Reference Documents for this device Reference Documents Scott Instruments Sentinel 6 7600 User Manual Figure 5 147 H2 Detector Display ...

Page 313: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 172 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 148 Scott Instruments Sentinel 6 Front View ...

Page 314: ...Warn LED will light If the hydrogen concentration goes above the Alarm setpoint the Alarm LED will light and the alarm relay will close An active alarm will initiate a controlled system shut down CALIBRATION Note A 4 or higher concentration of hydrogen in the air is flammable The test or span gas typically used to calibrate the hydrogen detector is 50 LEL or 2 hydrogen The alarm is set to activate...

Page 315: ...rise while decommissioning the tool please contact the Veeco TurboDisc Operations Customer Support group at 1 888 726 3472 for assistance Safety Precautions and Hazard Management In addition to the technician responsible for performing the maintenance a second site qualified technician must be present in the FAB during the maintenance procedure Whenever maintenance or other system related function...

Page 316: ... drawings are provided to assist in the performance of the procedures contained in this section Reference Drawings List System Footprint Gas Schematic Diagram GSD Flow Flange Assembly Water Schematic Reactor Assembly ECA Reactor Exhaust ASSOCIATED PROCEDURES K465i GaN System Shutdown K465i GaN Reactor Chamber Maintenance K465i GaN Flow Flange Maintenance K465i GaN Heater Maintenance Particle Filte...

Page 317: ...specifications for particle filters Cleanroom Compatible Gloves Disposable Cleanroom sleeves Aluminum Foil Flow Flange Hydraulic Lift Assembly VCR Gaskets 1 4 1 2 VCR Caps Alcohol isopropanol or methanol Cleanroom Wipes Container for Loose Small Parts Container to Catch any Residual Water in Cooling Lines Waste Container for Used Wipes etc System Maintenance Logbook Step Stool Tie Wraps Bubble Wra...

Page 318: ...the maintenance procedure Whenever maintenance or other system related functions are performed on Veeco TurboDisc systems safety procedures must be followed including the wearing of all required personnel protection equipment An electrical shock hazard exists De energize heater power supplies before servicing heater assembly The spindle assembly is a rotation hazard De energize the spindle motor b...

Page 319: ...WINGS The following drawings are provided to assist in the performance of the procedures contained in this section Reference Drawings List System Footprint Gas Schematic Diagram GSD Heater Assembly ASSOCIATED PROCEDURES K465i GaN Reactor Chamber Maintenance Leak Checking K465i GaN Flow Flange Maintenance ASSOCIATED DOCUMENTS Maintenance Schedule ...

Page 320: ...able Cleanroom Sleeves Wrenches Allen and Socket or Box End Blade Screwdrivers Adjustable Wrench Aluminum Foil HEPA Filtered Toxic Materials Vacuum Cleaner Alcohol isopropanol or methanol Cleanroom Wipes Container for Loose Small Parts Boron Nitride Replacement Parts Waste Container for Used Wipes etc System Maintenance Logbook 0 in lbs 50 in lbs torque wrench Torque screwdrivers 5 8 crowsfoot wre...

Page 321: ...nd when handling the parts Also avoid exposing the parts to dust and debris Maintenance of the Heater Assembly includes the following Removal of Previously Installed Heater Replacement Heater Assembly Installation Filament Installation Filament Calibration with Algorithm Maintenance of Filament only includes the following Removal of Previously Installed Filament s Replacement Filament s Installati...

Page 322: ...e and removal reinstallation of filaments may be performed without removing the heater assembly from the growth chamber Figure 5 149 Heater Assembly Caution Components may have deposition on them from growth runs Use care when removing them to prevent damage Boron Nitride ceramic parts are brittle Have replacement parts available before beginning heater disassembly to minimize system down time Bor...

Page 323: ...the Reactor 1 Locate and shut down the reactor s electrical connections to the heater assembly circuit breaker power supply switch 2 Disconnect the heater power supply cables 3 Locate and disconnect the heater baseplate cooling tube connections to the baseplate 4 Disconnect the electrode cooling tubes 5 Drain all water from the heater s lines and assembly 6 Loosen and remove the cap screws on the ...

Page 324: ... water lines see Figure 5 106 on the reactor cart frame and place it on a clean flat surface Figure 5 151 Heater Baseplate Assembly Outer Filament Removal 9 Loosen the screws connecting the outer filament to the flexible electrode while securing the outer filament with one hand preventing it from twisting with the socket driver and the flat head bit Then loosen the two screws connecting the outer ...

Page 325: ...flexible electrode Remove the remaining two screws from the non flexible electrode 13 Remove the Tungsten screws and remove the clamps from the connector ends see Figure 5 107 14 With the torque screwdriver and flat head bit while holding the flexible electrode to prevent twisting remove the two screws connecting the middle filament to the flexible electrode see Figure 5 106 Remove the remaining t...

Page 326: ... wire supports for the outer filament and replace them with wire supports from the Filament Replacement Kit 20 Remove and inspect each wire support for the middle filament and replace damaged or all wire supports with wire supports from the Filament Replacement Kit INSTALLATION OF REPLACEMENT HEATER ASSEMBLY Heater Installation 21 Remove the heater assembly from the shipping container and install ...

Page 327: ... 25 Under the baseplate install the proper washer and brass nut on each of the copper electrodes finger tight Using the torque wrench socket adapter and 1 5 16 socket carefully tighten all six 6 of the brass nuts in a criss cross pattern to a torque value of 10 ft lbs Finish assembling the copper electrode assembly by installing the tee fitting assembly see Figure 5 110 ...

Page 328: ...ter cooled baseplate counterbores Installing the Insulation Blocks 28 After inserting the ceramic cups for wire supports in the heatshield openings install the middle and outer filament insulation blocks see Figure 5 111 a Place the insulation block see Figure 5 111A on the surface of the heat shield near the outer electrode pair The two holes should be aligned with the two ceramic cups with the s...

Page 329: ...c Confidential All Rights Reserved Figure 5 156 Installations of Insulation Blocks Note Install insulation blocks on the heat shield surface Figure 5 111 block is placed near the outer electrodes Figure 5 111 insulation blocks and insulation tube are assembled and placed about the middle electrodes ...

Page 330: ...Inc Confidential All Rights Reserved MIDDLE AND OUTER FILAMENT REPLACEMENTS INSTALLATIONS Note Prior to installation of middle and outer filaments ensure that the filaments are placed with their coated darker sides facing up see Figure 5 112 A B Figure 5 157 Coated A and Uncoated B Filament Sides ...

Page 331: ...uld be aligned with the two ceramic cups with the stepped face pointing upward b Preassemble the insulation blocks and supports see Figure 5 113B by inserting the insulation tube into the holes of the blocks Place it on the heat shield surface spanning the hole in the shield with the tube between the middle electrodes and the two holes aligned with the ceramic cups see Figure 5 113B Note Install i...

Page 332: ...he filament is not concentric with the baseplate in the front to back direction looking from the electrodes end Ensure that the edges of the filament connector ends are flush with the edges of the electrodes 33 Using the torque screwdriver and the flat head bit gradually tighten all the screws for the Middle filament until a torque value of 10 in lbs is reached for each screw First tighten the scr...

Page 333: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 192 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 159 Clamps and Screws for the Outer Filament Installed ...

Page 334: ...ations and Maintenance P N 1212831 Rev C Page 5 193 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Note The final assembly resembles that shown in Figure 5 115 Figure 5 160 Heater Assembly ...

Page 335: ...ecommissioning Instructions include Cleaning a Soiled System Bake Purge Removal of toxic materials and bubbler lines Source Bubblers Preliminary System Preparation Flushing the Water Lines Removing the Ebara Process Pump from the System Remove the Heat Exchanger Disconnect House Gas Supply Lines Dangerous Gases H2 Si2 H6 NH3 Protecting the Gas Panel Cleaning of the Reactor Removal and cleaning of ...

Page 336: ...f the system 2 Purge At 24 hours purge all gases from the system with an N2 flow throughout with a 50 setpoint at all MFCs removing all gases aside from N2 100 at Torr at the reactor 3 Removal of Toxics Vacuum all toxic materials from the system everything but N2 down to x e m 4 Removal of Bubbler Source Lines Remove bubbler legs Figure 5 161 and replace the bubblers with jumpers Figure 5 162 Figu...

Page 337: ...e heater following the K465i GaN Heater Maintenance procedures 6 Reinstall the flowflange on the reactor following the Flow Flange Reinstallation procedure K465i GaN Reactor Chamber Maintenance 7 Remove power to the robot using the robot Emergency Power Off switch 8 Open the Transfer Hub Assembly following the K465i GaN Transfer Hub Chamber Maintenance procedure 9 Using an Allen wrench remove the ...

Page 338: ... hose into the 5 gallon water jug 17 Open the valve attached to the hose on the water manifold 18 Disconnect the air from the system 19 Place the air line next to the system hook up for water 20 Shut the water off to the supply water line by closing the valve at the ceiling Close the return line valve as well 21 Disconnect the return line and attach the compressed air line to the opening of the re...

Page 339: ...return lines and secure the nylon hoses using tie wraps Pressurize the entire system with N2 at 760 Torr Figure 5 164 Flushing the Water Lines with Compressed Air Removing the Ebara Process Pump from the System 31 Remove the N2 purge line from the Ebara using a 5 8 wrench Cap the end with an end cap and VCR gasket 32 Disconect the exhaust outlet line and cap both ends with a KF 40 cap o ring and l...

Page 340: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 199 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 165 Capped Water Lines ...

Page 341: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 200 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 166 Water Lines Connected to Monitors Regulators ...

Page 342: ...of the heat exchanger 45 Disconnect all lines at the closed valves and label 46 Roll the Heat Exchanger out of the system frame 47 Secure the lines to the system frame using tie wraps 48 Coil the power cord and secure the coil to the heat exchanger using tie wraps Disconnect Gas Supply Lines 49 Ensure that all gas supply lines including N2 H2 NH3 etc are connected 50 Ensure that all gas supply lin...

Page 343: ...21 THA pump R22 Glove box R23 R24 Heat Exchangers R29 and R35 Process pumps from the bottom of the CBP and pull back inside the SDA and tie wrap them to the SDA system frame 72 Disconnect frame grounds from the THA RCA and SDA and pull back into ECA 73 Remove the filament power cables from reactor and pull back into the ECA 74 Remove the computers key boards flat screen monitors mice and pack with...

Page 344: ...K465i Operations and Maintenance P N 1212831 Rev C Page 5 203 Copyright 2012 Veeco Instruments Inc Confidential All Rights Reserved Figure 5 167 Castor Mounting ...

Page 345: ...r bolt the system castors into the frame c Remove the four securing bolts from the THA RHA d Recess the THA legs until the frame is resting on the castors and move the THA out e Repeat steps a c for the remaining modules leaving ECA and CBP joined on castors Inspect Clean and Pack Removed Components 86 Gather the reactor and Transfer Chamber parts and inspect for wear discoloration and damage 87 I...

Page 346: ...uments Inc Confidential All Rights Reserved Figure 5 168 LFA GB Final Steps 95 Inspect the system for any remaining loose hardware 96 Tie wrap the light covers to the fluorescent light fixtures 97 Tie wrap all loose cabling to assure safe transit 98 Install the panels and doors as required ...

Page 347: ...mber and the Carrier chamber The smaller Cassette chamber is used to transfer the wafers into and out of the glove Box The larger Carrier chamber is used to load the carrier The Glove Box image becomes an animation when activated The buttons for controlling the Glove Box operations of Load pump down and Unload Vent are used to start the corresponding operations in the Glove Box and to indicate to ...

Page 348: ...cating the pressure in the carrier chamber The lower gauge shows the pump pressure Carrier Details Lid Open Closed Green indicates the Carrier lid is closed Red it is open Door Closed Green the Carrier door is closed Red it is open Pump Purge button Green indicates the pump purge is active Gray it is inactive Red shows that there is an error Lift Up Down Green indicates the carrier lift is down Re...

Page 349: ...chieve pump down status Procedure 6 2 Pump Down Pressure 1 Carrier Chamber a If pressure is low chamber is in vacuum what is low config item goto complete b If the cassette pump down pump purge is going on wait until they complete for max 20 mins If after 20 mins they are not complete generate error and complete sequence c Check Vent Valve 5 is closed d Checks that the lift is down not present in ...

Page 350: ...sed d Generate an error if lid is not closed Cassette lid is not down e Show all Di status in panel f Remember if 6 is open Close the vacuum valve 6 carrier chamber g then Proceed to open Vacuum Valve 8 h Pressure goes down top vacuum configuration for cassette i Pump Purge config settings for High low Pressures and number of cycles specific to cassette chamber j Close Vacuum Valve 8 k If 6 was op...

Page 351: ...n position sensor 15 Then adjust the flow adjusters evenly until you get an even open and close rate 16 Next move on to the Carrier lid 17 Verify the Motor Chain has proper tension 18 Use the Carrier Cassette selection joystick move the joystick to the left while at the same time using the up down joystick hold it in the up position until the lid fully opens 19 Verify smooth movement of the lid an...

Page 352: ...to atmosphere The glovebox pressure should remain stable causing the gloves to remain pressurized and extended from the glovebox Pressure reading on the controller should maintain a static pressure 3 Verify Foot Pedals are functional 4 Verify Entire Glovebox is leaktight 5 Verify pneumatic speed adjusters are locked down Controller Verification 1 Does the glovebox environment controller power up p...

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