K465i Operations and Maintenance
P/N 1212831 Rev C
Page 5-60
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2012
Veeco Instruments, Inc. Confidential
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Figure 5-53. Continue Vacuum Chamber for Leak Check
Figure 5-54. Log Information Visible After Clicking on Continue
7. The chamber automatically pumps down and the screen shown in Figure 5-55 appears, indicating that
the chamber is ready to be leak-checked.