K465i Operations and Maintenance
P/N 1212831 Rev C
Page 5-154
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
18. Click
Continue
on the displayed dialog box to continue the bubbler routine after the new bubbler is
installed.
19. When instructed to do so, open the white
Alkyl Manual Valves
. Continue the program once the valves
are opened.
20. The bubbler legs will be evacuated by the bubbler routine.
21. The system will display the message,
The Bubbler Legs are now Ready to be Leaked
Checked - Perform Leak Check. Has Leak Check Been Successfully Completed?
Leak Checking
Note:
Refer to
Section 5.9 Leak Checking
for additional information and leak checking
techniques.
22. Hook up the leak detector to the vacuum trunk line at the leak check port, (
144), but DO
NOT open the manual isolation valve.
23. Pump the leak detector down and leak-check the hose and connection up to the manual isolation
valve on the vacuum trunk line, still keeping valve closed.
24. Put the leak-detector in
Hold
or stand-by mode.
25. Open the manual isolation valve on the vacuum trunk line.
26. Press
Start
on the leak detector and wait until the leak detector is in the 10-8 leak-rate scale or lower.
27. Spray Helium around the bubbler VCR fittings; make sure that the new bubbler legs are leak-tight. If
Helium is detected by the leak detector then tighten the VCR fittings and re-leak check.
28. Close the leak check valve on the vacuum trunk line and disconnect the leak detector from the
system.
29. Click
Continue
in the displayed dialog box when the leak check is completed successfully.
30. The system will continue with the pump and purge cycles.
Re-Heating the Bubbler Legs
31. When prompted, heat the bubbler legs, using the heat gun, until they are hot (~50 to 60
o
C). This
evaporates the water vapor off of the tubing walls. As in the first heating, do not overheat the lines.
32. Continue the bubbler routine when heating is complete.
33. Close the white Alkyl Manual Valves when prompted to do so. Click
Continue
when the valves are
closed.
34. The system will return to idle.
35. The system will back fill and purge the bubbler legs with H
2
.
36. The system will return to idle status.
37. The status message
End of Bubbler Change Routine, Close Window if Finished
will
be displayed. Close the window.
38.
Using the alkyl source monitor, type in the new value for the bubbler content under the “Init” column
and re-
initialize the “Init” amount.
39. Weigh the spent bubbler to determine the amount of alkyl remaining and tag the spent bubbler.
Record the relevant information on the tag (e.g., date, time, system removed from, etc.)
