Veeco K465i GaN, Operation And Maintenance

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K465i Operations and Maintenance P/N 1212831 Rev C
Page 5-139
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
23. Ensure that each filter is centered and level.
24. Turn the second stage upside down until the handle is visible. Using the handle, lift and place the
assembly into the filter housing, on top of the cooling plate.
25. Place the new O-ring on the outer lip of the particle filter body, immediately above second stage, and
clean it with IPA.
26. Replace the third stage housing body on top. Ensure that there is a good fit and that both surfaces
touch the O-ring. Place the belly band around the O-ring and over the two protruding flanges and
tighten with a wrench.
27. Repeat step 24, step 25, step 26, and step 27 with media filters.
28. Place the new O-ring on the outer lip of the particle filter body just above third stage and clean it with
IPA.
29. Replace the filter body cap on top. Ensure a good fit and that both surfaces touch the O-ring. Place
the belly band around the O-ring and over the two protruding flanges. Tighten it with a wrench.
30. Clean the outlet reducer (see
Figure 5-129
), and using a new O-ring, place the outlet reducer on the
outlet flange of the particle filter housing.
31. Place claw clamps evenly around the flange seals and tighten them in a star pattern.
32. (This step requires two people.) Raise the filter back into the cart and secure the strap (see
Figure
5-127
).
33. Replace the neck collar (see
Figure 5-128
).
34. Raise the locking feet such that the wheels can touch the floor and the assembly can be moved (see
Figure 5-126
).
Connecting the New Particle Filter Assembly
Note:
Every KF-40 connection requires a centering ring assembly. Centering ring
assemblies are provided with the kit (some are reused from the original assemblies.
Before reinstalling the centering rings in the exhaust, be sure to clean them with isopropyl
alcohol.
35. Install the original ball-valves on the new weldment in the same orientation as in
Figure 5-129
.
36. Roll the new particle filter cart setup into position and integrate it to the PEA and the reactor cart ball
valves (see
Figure 5-136
).