K465i Operations and Maintenance
P/N 1212831 Rev C
Page 3-30
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
Section 3.7.
Exhaust Module (PEA)
The
Process Exhaust Assembly
(
PEA
) includes:
Particle Filter(s): Material flows from the reactor through the Particle Filter
Housing(s), through the Throttle Gate Valve, into the Ebara dry vacuum pumps and
out to the facility board. The particle filters are placed in the path of the growth
chamber exhaust to capture solid reaction byproducts.
Main Process Pump2
Throttling Gate Valve for reactor pressure control: This valve maintains growth
chamber pressure at a desired setpoint, with signal input from the growth chamber
baratron, and position indication on the valve, on the valve controller and on the
Nexus screen.
Baratrons
Isolation Valve
1.5” exhaust line
Ebara ESA25D A70W process pumps (2): Positive displacement vacuum pumps with
5-stage roots-type configurations, and with two symmetrical lobes aligned
perpendicular to one another, with a rotor in the center to control their movement.
Timing gears synchronize the non-contact rotors
Manual and pneumatic ball valves
Replaceable high temperature particle filter
