K465i Operations and Maintenance
P/N 1212831 Rev C
Page 1-13
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
Section 1.2.
Lock Out/Tag Out Instructions and
Procedure
This procedure establishes the minimum requirements for the lockout of energy isolating
devices whenever maintenance or servicing is done on a K465i GaN system. It is used to
ensure that the system, or components, are stopped, isolated from all potentially hazardous
energy sources, and secured before technicians perform any servicing or maintenance. It
shall be used in all cases where the unexpected energization, start-up of the machine or
equipment, or release of stored energy could cause injury.
TYPE AND MAGNITUDE OF ENERGY
There can be many types of hazardous energy associated with the K465i GaN system
including, but not limited to, those listed in
, below. This table lists forms of
energy that may pose a danger, and these forms of energy must be considered and
controlled while servicing or maintaining the system.
Table 1-4. Types of Hazardous Energy Associated with K465i GaN
HAZARDOUS ENERGY
FORM
SYSTEM APPLICATION
Electrical
480V/150A, 380V/200A, Motors, Electrical Circuits
and Breakers, Power Supplies, Pumps, Controllers
Mechanical
Belts on Spindle, Gate Valve
Hazardous Materials*
Nitrogen Gas - asphyxiation, pressurized process
lines
Hydrogen Gas - flammable gas, pressurized process
lines
Ammonia Gas - flammable gas, pressurized process
lines, toxic gas
Silane Gas - pyrophoric, pressurized process lines
Disilane Gas - pyrophoric, pressurized process lines
Metal Organic - pyrophoric, pressurized process lines
Compressed Air - pressurized process lines
Thermal
Heat from reactor, Heat from H2 palladium cell if
system is fitted with unit, fire with pyrophoric
materials.
Radiation
InSitu system lasers
Note:
Technicians should review MSDS for materials utilized within their K465i GaN
system.
