K465i Operations and Maintenance
P/N 1212831 Rev C
Page 4-17
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
EBARA PROCESS PUMP
Note:
Make sure all steps in
Pre-Operation of the Ebara Process Pump
are completed
before attempting to start the pump
.
Procedure 4-10: Ebara Process Pump
–
Local Mode
Starting the Pump
1. When all pre-operation conditions have been met, start the pump by pressing the Start button on the
LCD controller (Figure 4-5). The main pump will start and the MP RUN LED will light.
2. Using the
DISP.SELECT
key, Set the LCD controller to display cooling water flow (indication no.3)
and verify that the cooling water flow is 3.5 L/min or more.
Note:
If there is an attempt to start the pump while ALARM/TRIP is active,
START/FAIL
is
indicated on the LCD controller
.
3. Make sure that the pressure gauge on the front of the pump (Figure 4-3) indicates 0.04 - 0.07MPa.
(There is a green band on the pressure gauge indicating the proper range.)
4. If the ALARM/TRIP signal is active, refer to the troubleshooting guidelines in the Ebara maintenance
manual. After the cause for the ALARM/TRIP signal is remedied, press the
RESET
button on the LCD
controller, Figure 4-5.
Note:
When the buzzer mode is in use, the buzzer can be stopped by the
BUZZER OFF
switch
.
Running the Pump
5. While the pump is running, periodically monitor the cooling water flow to ensure the pump is receiving
adequate cooling water (>3.5 l/min).
6. Periodically check that the N
2
pressure gauge on the front of the pump indicates 0.04 - 0.07MPa.
Notes:
The pump must run a minimum of 30 minutes before the evacuation of process gases can
begin. However, 4 hours or more is recommended, to allow the casing to reach operating
temperature
.
During normal operation, the LCD controller display will indicate the main pump and booster
pump current draw.
Warning!
Do not touch the pump casing and exhaust piping during operation, or
for a period of time after operation ceases; do not remove the pump cover during operation.