K465i Operations and Maintenance
P/N 1212831 Rev C
Page 6-6
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
33. Verify vacuum interlock on the Carrier Lid, Carrier Door and Cassette Door in the PLC digital outs.
34. Verify Sensors are being made for the Carrier Lid, Carrier Door, Cassette Lid, Cassette Door and
Pedestal.
Additional Checks Required
1. Verify the glovebox light is operational.
2. Verify the Carrier Lid Seals properly under vacuum by pressurizing the glovebox and venting and
opening the Carrier Chamber to atmosphere. The glovebox pressure should remain stable causing
the gloves to remain pressurized and extended from the glovebox. Pressure reading on the
controller should maintain a static pressure.
3. Verify Foot Pedals are functional.
4. Verify Entire Glovebox is leaktight.
5. Verify pneumatic speed adjusters are locked down.
Controller Verification
1. Does the glovebox environment controller power up properly.
2. Confirm the pressure reading is set properly to customer requirements. (torr or mbarr)
3. Pressure Setting.
4. Low setpoint = 1.5 torr.
5. upper setpoint=3.5 torr.
6. If an inconsistency or failure is discovered, write a Tracker Discrepancy Report stating the finding.
Assign the Tracker to either the Project Manager or Design Engineering.
