K465i Operations and Maintenance
Doc 1100481 Rev C
Page 1-1
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
CHAPTER 1.
SAFETY SUMMARY
This section contains important safety information regarding the operation and maintenance
of the K465i GaN system. Topics covered include general safety, warning, caution and note
usage, symbol usage, general precautions, hazardous materials, safety interlocks and
alarms, safety switches, and lockout/tagout instructions. These general safety notices
supplement the specific warnings and cautions appearing at the start of each section.
Before undertaking any maintenance or operational procedure, technicians should review all
appropriate documentation to ensure they understand the task to be performed, as well as
all hazards and safety issues.
Safety Precautions and Hazard Management
System is to be operated only by trained, qualified technicians.
End user must provide personal protective equipment (PPE) when changing
bubblers and cleaning out the reactor. The personal protective equipment
must be approved as per the PPE Directive. Reference the Operations and
Maintenance Manual for the required PPE.
Dismantling, assembling, and installation should only be performed by
qualified technicians. Reference the Operation and Maintenance Manual for
associated procedures.
For safe lifting, transporting and handling, reference the documents
PRS-
141
and
MI-0000293
, provided with the tool packing list.
Use a step ladder when repairing or cleaning components out of reach.
GENERAL SAFETY NOTICES
The following general safety notices supplement the specific warnings and cautions
appearing elsewhere in this manual. There are required precautions that must be
understood and applied during operation and maintenance of the equipment covered herein.
Qualifications
Due to the complexity of the equipment and the hazardous materials used in the
manufacturing process, only those personnel trained and qualified should perform any
operation or maintenance tasks on Veeco K465i GaN Systems. Maintenance personnel
should be trained to perform all maintenance procedures, including the use of personal
safety equipment such as Self Contained Breathing Apparatus (SCBA), respirators, and
chemical and fire resistant clothing.
Do Not Repair Or Adjust While Alone
Under no circumstances should repair or adjustment of equipment be attempted while
alone. The immediate presence of another person capable of rendering aid is required.
Before making adjustments on electronic equipment, be sure to protect the body against
grounding. If possible, adjustments on electrical equipment should be made with one hand,
with other hand free and clear of the equipment. Even when power has been removed from