K465i Operations and Maintenance
P/N 1212831 Rev C
Page xii
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
Shutdown Procedures and
Decommissioning Processes
Chapter 5. MAINTENANCE AND REPAIR
The Maintenance and Repair chapter of this document provides guidelines for:
Maintenance Safety
Routine Maintenance
Reactor Chamber Maintenance
General Cleaning
Maintenance of Flow Flange, Heater Assembly, Particle Filter, Bubbler/Bath
Leak-Checking
APPENDIX A: GLOSSARY
Document Presentation
The
Table of Contents
and
List of Reference Drawings
provide listings of the procedures and
engineering drawings available for use. The entries contained on these two lists are hyper-
linked to specified documents. To use the lists, select the listed desired subject (procedure,
component document or drawing). This will automatically activate a view of the document
on your selected page or drawing.
Each individual section begins with a list of any
Safety Precautions and Hazard Management
messages applicable to that section. The safety list is followed by a list of the individual
procedures provided in that section. These individual procedures are hyper-linked to a
specific location within the document, and are highlighted in red.
Notes and graphics appear within some procedures. The procedures, notes and safety
guidelines in this document appear as in the samples below:
Procedure Sample:
1. Sample text.
2. Sample text.
Note:
Note
sample text.
Safety Precautions and Hazard Management
Safety information sample text.
