K465i Operations and Maintenance
P/N 1212831 Rev C
Page 5-148
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©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
Figure 5-143. Leak-Check of Housing Assembly/Chamber
MATERIAL DISPOSAL AND DOCUMENTATION
Procedure 5-21: Material Disposal and Documentation
1. Place the spent particle filter in the 5 gallon bucket with mineral oil or sealable metal container upon
removal from the system. Then place all of the hazardous materials (the spent filter, soiled wipes, etc.)
into clear ziplock bags. Identify the bagged materials with the proper identification (indicate material,
date, initials, etc.). A tag or label may be utilized, just assure that it is securely fastened to the bag.
2. Dispose of the hazardous material in accordance with facility procedures and the local environmental
regulations.
3. Perform any general housekeeping needed around the maintenance area.
4. Complete any required documentation (i.e. logs, reports, etc).