ONTRAK Synergy Integra, Operation Manual

Page: 169 / 350

C h a p t e r 9 P R O C E S S R E C I P E
7/26/00 INTEGRA Operations Revision A 9-9
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Change EVENT ROLLER SPEED
5 Touch ROLLER SPEED to display the
NUMBER PAD
.
6 Enter the required ROLLER SPEED ( RPM ) in the
NUMBER PAD
screen (not shown), and touch ENTER.
The ROLLER SPEED controls the speed at which the wafer turns
between the brushes. The setting may be changed to vary the
wafer’s rotation speed.
The
ROLLER SPEED is not operable if the
EVENT TIME is “
0
.”
STANDARD
OR
OR
ROLLER SPEED
buttons for the
three EVENTS.
STANDARD