ONTRAK Synergy Integra, Operation Manual

Page: 178 / 350

9-18 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
When Alarm #158 timeout value is exceeded, and the
FLUSH
DURATION, and ALARM BRUSH MODE
values are set to their
default values, then DI High Flow (default = 0) does not flow DI water
onto the wafer, the brushes remains down (default), and
the brushes
and rollers continue to turn.
When Alarm #158 timeout value is exceeded, and
FLUSH
DURATION and ALARM BRUSH MODE
values are specified ,
then DI High Flow (value > 0) flows DI water onto the wafer for a set
period of time, the brushes move off (UP) the wafer, and
the brushes
and rollers stop turning.
Once the wafer can transfer out of Brush Station #1, Alarm #158 is
cleared, the brushes return to their process position and normal
processing continues.
16 FLUSH DURATION, PROCESS ALARM TIMEOUT, and ALARM
BRUSH MODE work together. Touch FLUSH DURATION to
display the
NUMBER PAD
screen (not shown) to set the time DI
High Flow will dispense DI water once Alarm #158 is posted. The
flush duration
for Brush Station #1 is programmable and the
parameter range is 0 - 65535 . Enter value in 10
th
of seconds .)
The current
status displays on the right side of the button
in seconds
. A value of
0 (default) disables the alarm. (Note: Brush Station #2 FLUSH
DURATION is triggered by
programmable Alarm #159.)
STANDARD