C h a p t e r 1 0 A L A R M S
7/26/00
INTEGRA Operations Revision A
10-45
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Disposition:
None. All operations continue. Output cassette
mode is changed to “continuous.”
GEM ALID: 84
GEM Alarm.
A
LARM
ID: 85
Description:
Slot Integrity Lost. Slot Already Used
Posting Program:
Output station
Alarm Type:
Alarm & Sonalert
Reason:
Every time the cassette indexes to a new slot, the slot is
checked to see if a wafer is already in the slot. If the system is
running in Slot-to-Slot mode and a wafer is found in a slot that is
needed for the next wafer, the alarm is posted.
Disposition:
Output cassette mode is changed to “continuous.”
GEM ALID: 85
GEM Alarm.
A
LARM
ID: 86
Description:
Brush Station #2 Exhaust Failure
Posting Program:
Monitor
Alarm Type:
Alarm & Sonalert
Reason:
This alarm is valid only on systems equipped with
exhaust sensors. The alarm is posted if the
brush 2 exhaust
sensor
reports no exhaust.
Disposition:
System is put into CLEARING mode.
GEM ALID: 86
GEM Alarm.
A
LARM
ID: 87
Description:
Chemical Delivery System Reports An Alarm
Condition
Posting Program:
Monitor
Alarm Type:
Alarm & Sonalert
Reason:
This alarm is valid only on systems with the DCI
Chemical Delivery System option. If HF is enabled and the DCI
system reports an alarm this alarm is posted.
ALCD
ALTX
ON CEID OFF CEID
6
84 Output Cassette Mode set to CONTINUOUS.
369
370
ALCD
ALTX
ON CEID OFF CEID
6
85 Slot integrity lost. Slot already used.
371
372
ALCD
ALTX
ON CEID OFF CEID
6
86 Brush Station #2 Exhaust failure.
373
374
Summary of Contents for Synergy Integra
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Page 24: ...1 4 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 38: ...2 14 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 222: ...9 62 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Page 314: ...10 76 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...