ONTRAK Synergy Integra, Operation Manual, Page: 202 / 350

9-42 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
.
A
NOTE:
IDLE CHEM is not typically enabled (ON) for Lo Toxic chemicals unless the
system is processing wafers 100% of the time. If IDLE CHEM is ON during the brush
idle time, the consistency (dosing) of the process chemistry pH is affected, and the
associated dose mode parameters must be adjusted accordingly. Unless processing
wafers 100% of the time, it is best to disable (turn OFF) IDLE CHEM, since process
chemicals can be wasted during Idle Time.
Change IDLE LOW FLOW DI
34 Toggle the IDLE LOW FLOW DI ON
or
OFF
(default:
ON
) for Brush
Station #1 or Brush Station #2.
Once the system is in IDLE, and the idle time elapses (BRUSH
IDLE TIMER), the IDLE LOW FLOW DI will turn ON to clean the
brushes. Brush cleaning continues for the interval time set in the
BRUSH IDLE ON TIME. Brush cleaning stops for the interval
time set in the BRUSH IDLE OFF TIME.
If the
IDLE CHEM,
and/or the
IDLE LOW FLOW DI
, and/or the
IDLE HI FLOW DI
are all set to
ON
, then they will all start at the
same time.
STANDARD
Icon only displays
when a Lo Toxic
chemical such as
NH
4
OH is used.