3-18
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
EXHAUST SENSOR
Differential Pressure Switch
.
Switch is set so that it
signals when the exhaust
pressure drops below the
minimum allowable level
(.5” of H
2
O) for the closed
Brush Station.
Icon is
green
when exhaust rate is sufficiently
high for processing requirements. The
exhaust pressure must remain at a safe level
for the system to process wafers.
Icon is
red
when exhaust rate is too low. A
low exhaust condition halts processing. If an
exhaust failure (low) occurs, an alarm is
posted and the system is cleared of wafers.
No additional wafers are sent, but wafers in
process are completed.
WAFER SENSOR
Fiber Optic Emitter/Receiver
Sensor
. Fiber optical cables
are mounted above and
below the track attaching
to the sensor mounted on
the front of the Brush
Station #2 frame. As the
wafer enters Brush Station
#2, the wafer breaks the
sensor’s beam, signaling
that a wafer is present.
Icon is
green
when a a wafer is present
(wafer transferring between Brush Station #1
and Brush Station #2) and
red
when a wafer
is not present. (Note: The lid must be closed
and locked before processing can continue.)
FRONT ROLLER
SENSOR 2
(1
st
sensor; closest to
the roller truck.)
Emitter/Receiver Optical
Sensor
. Sensor cables are
attached to the Brush
Station #2 wall extending
toward the roller truck. The
flag is attached to the Brush
Station #2 rear roller truck.
The roller positions, as
demonstrated by their
sensor status, show which
size wafer is processing.
If the Front Roller Sensor 1 icon is
red
, and
the Front Roller Sensor 2 icon is
green
, the
system is set to
ROLLERS AT 8 INCH
, for 8
inch wafers.
If the Front Roller Sensor 1 icon is
green
and
the Front Roller Sensor 2 icon is
red
, the
system is set to
ROLLERS AT 6 INCH
, for 6
inch wafers.
If both sensor’s icons are
green
, the rollers
are at
ROLLERS
OPEN
.
If both sensor icons are
red
, the rollers are in
a
ROLLERS AT UNKNOWN
POSITION
.
The confirmation (one of the above bold type
designations) is displayed in the box in the
lower left corner.
SENSOR NAME
TYPE AND LOCATION
FUNCTION
Summary of Contents for Synergy Integra
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