ONTRAK Synergy Integra, Operation Manual

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10-80 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Appendix B --
Collection Events
GEM collection events or CEIDs are relevant to process program
management and identify wafer movement or imply wafer
movement has taken place. The Integra GEM specific collection
events exist for the interchange between the Input Robot and
Input Station and the interchange at the Spin Station (Spin
Fingers) and the Output Robot. Add the GEM CEID information
in the following table (next page) to the information contained in
Appendix B -- Collection Events.
Appendix C -- Alarms
The CMP Cleaner reports alarms to the host when they occur.
The Integra has a fixed set of alarms conditions which can occur.
Each alarm is identified by a unique Alarm (ALID), has an
associated severity code (ALCD), and alarm text (ALTX). Each
alarm ID (ALID) can be either of two states: CLEAR (off) or SET
(on). Several alarms can be SET simultaneously. At power up, all
Alarms are cleared.
116 SV U1 RUNCLEAR
0 = not
1 = clearing
117 SV U1 WAFERRECOVERY
0 = not
1 = recovering
127 SV U1 INPUTWAITFORSTART
0 = no intervention
1 = waiting for a start command
CEID Name and Description
50 InputStationReady
51 InputDoorOpen
52 InputDoorClosed
53 InputWaferAccepted
54 OutputStationReady
55 OutputFingersOpen
56 Brush1Transfer
57 Brush2Transfer
58 WaferRecovery