C h a p t e r 9 P R O C E S S R E C I P E
7/26/00
INTEGRA Operations Revision A
9-13
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Set Or Change Brush Station #1 General (Other) Parameters
The processes circled in the illustration below are
not
EVENT dependent.
They are set to operate according to their own individual parameters.
These parameters occur during CONTINUIOUS wafer processing mode.
Do not confuse these parameters with Brush Conditioning parameters.
They are
not
part of the Brush Conditioning parameters. The following
table defines the general (other) Parameter buttons.
toggle switches
for each
EVENT.
Edge Clean
STANDARD
STANDARD
Summary of Contents for Synergy Integra
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