6-10
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Wafer Confirmation Request Message
Is a wafer in Brush 2 ?
STEP
PROCEDURE
COMMENTS
4
Wafer recovery continues with Brush Station
#1. There may be an inquiry in the message
box as to whether or not a wafer is present in
the station. Answer using the YES or NO
button at the bottom of the Wafer Recovery
window. See example in the preceding
illustration.
.
The wafer will be recovered all the way to the
Spin Station or Output Robot.
Once the wafer has been recovered, Brush
Station #1 is RESET.
A
NOTE:
If Brush Station #1
normally uses HF in the
processing cycle, it WILL NOT
be dispensed during the Wafer
Recovery procedure. If Brush
Station normally processes with
HF, the wafer
WILL BE
processed with HF when it
enters Brush Station #2.
5
When the wafer recovery is complete, a
message will be displayed in the Wafer
Recovery window stating that, “Wafer
Recovery is Complete.” See the following
illustration.
Check and visually verify that all wafers have
been properly recovered. When all wafers
have been recovered, touch the
OK
button.
This completes the Wafer Recovery
process.
Summary of Contents for Synergy Integra
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