ONTRAK Synergy Integra, Operation Manual

Page: 58 / 350

3-20 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
FRONT LIFTER
EXTEND SENSOR
(Lowers front end of
brush.)
Optical Interrupt, Flag
Sensor . Located in the
micro stepper driver
assembly (inside the metal
box attached to the micro
stepper motor and the
driver), on the system front
side, directly opposite
from the Brush Station #2
back side micro stepper
assembly. Indicates when
the stepper motor plunger
is in the EXTEND (up)
position, causing the brush
to move down into the
wafer cleaning position
(brush is attached to a
rocker arm, opposite the
plunger).
Icon is green when the front lifter is in the
EXTEND position and red when the lifter is
not in the EXTEND position.
FLAT FINDER
SENSOR
Fiber Optic Emitter/Receiver
Sensor
. Located on the
front roller truck, near the
Brush Station #2 exit, with
the emitter over the track
and the receiver under it.
Detects the flat edge of a
wafer (e.g., 8 inch), so that
the wafer can be correctly
positioned on the conveyor
for transport into the Spin
Station.
Icon is green when a wafer flat is detected
and
red
when a wafer is not detected.
Important: The software must see the wafer’s
trailing edge to signal the release of the
wafer.
LID OPEN SENSOR Hall Effect Sensor . Located
on the pneumatic cylinder
which operates the Brush
Station lid.
Icon is green when the lid is OPENED.
Processing is terminated until the lid is
closed. Icon is red when the lid is completely
CLOSED.
LID CLOSED
SENSOR
Hall Effect Sensor . Located
on the pneumatic cylinder
which operates the Brush
Station lid.
Icon turns green when the lid is completely
CLOSED. The lid must be closed for
processing to continue. Icon is red when the
lid is not completely closed. Process halts
until the lid is close.
BRUSH LID
LOCKED SENSOR
Hall Effect Sensor . Located
on the pneumatic cylinder
which operates the Brush
Station lid lock.
Icon is green when the lock is engaged
(locked) and red when the lock is disengaged
(unlocked).
A
NOTE:
It is possible for the lock to
be engaged with the lid open. The
system requires both the lid closed and
locked signals before processing can be
initiated.
SENSOR NAME TYPE AND LOCATION FUNCTION