ONTRAK Synergy Integra, Operation Manual

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10-24 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Disposition: The Brush 2 Station program will not continue until
all roller position sensors report that the rollers are closed to the 8
inch position.
GEM ALID: 30
GEM Alarm.
A
LARM
ID: 31
Description: Brush Station #2 Error Looking For Spin Spindle Lock
Sensor
Posting Program: Brush 2 Station
Alarm Type: Alarm & Sonalert
Reason: When the Brush 2 Station program is told to release a
wafer to the Spin Station, a check is made to ensure that the Spin
Station is in the correct position to accept a wafer. The alarm
indicates that Brush Station #2 tried to lock the spindle (rotation)
and did not detect the sensor.
Disposition: The Brush 2 Station program will not continue until
the spin spindle lock sensor reports that the spindle is locked.
GEM ALID: 31
GEM Alarm.
A
LARM
ID: 32
Description:
Brush #2 Error Looking For Megasonic Arm Home
Sensor
Posting Program: Brush 2 Station
Alarm Type: Alarm & Sonalert
Reason: If the Megasonic arm is not in the HOME position when
it is time to release the wafer into the Spin Station, an attempt is
made to home it. The alarm indicates that the attempt to home
the Megasonic arm was made and failed.
Disposition: The Brush 2 Station program will not continue until
the megasonic arm home sensor detects the megasonic arm in the
HOME position.
GEM ALID: 32
GEM Alarm.
ALCD ALTX ON CEID OFF CEID
6 30 Brush #2 Error trying to close rollers to 8 inch. 261 262
ALCD ALTX ON CEID OFF CEID
6 31 Brush #2 error looking for Spin Spindle Lock
sensor
.
263 264
ALCD ALTX ON CEID OFF CEID
6 32 Brush #2 error looking for Megasonic Arm
Home Sensor
265 266