3-28
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Megasonic Sweep Timing
The total processing time in the Spin Station is tied to the megasonic
process activity if the megasonic is used. (If the megasonic process is
not used, the process time is set by the TIME button in the Spin Station
Recipe Events column.) The megasonic sweep time is composed of
two elements, the
MEGASONIC SWEEPS
and the
SECONDS/SWEEP
.
The MEGASONIC SWEEPS sets the number of times the megasonic
arm sweeps back and forth across the wafer. The SECONDS/SWEEP
sets the time it takes the arm to travel from the wafer edge to the center
of the wafer; double this time to get the total time for one complete
sweep. The total time for that “Event” is the NUMBER OF SWEEPS x
SECONDS/SWEEP x 2. There are nine events in every complete spin
cycle. The timing for each event can be set independently.
T
OWER
W
AFER
(R
OBOT
P
RESENT
) S
ENSOR
The
TOWER WAFER (ROBOT PRESENT) SENSOR
, an infrared emitter
receiver sensor set, is situated vertically across the Spin Station exit
tunnel. The sensor detects the presence of the Output Robot arm
(with or without a wafer) in the exit tunnel as the Output Robot arm
enters/exits the Spin Station.
D
RYING
L
AMP
A 1000 watt halogen lamp is built into the Spin Station cover. This
lamp can be configured to be
ON
during a portion of the time that the
Spin Station is drying a wafer. There are nine EVENTS in the Process
Recipe, each of which allow for the operation of the lamp.
A heat lamp current sensor verifies that the lamp is working. If it
does not, an audible alarm is activated, the failure is reported to the
operator, and the spin dry event is extended for 90 seconds to ensure
that the wafers in process are completely dried. The system will then
clear all wafers from the track to ensure cleaning uniformity.
S
PIN
S
TATION
ULPA F
ILTER
(
OPTION
)
The optional Spin Station filter is an ultra pure air (ULPA) filter
(Filter level purity = .02y @ 99.999%) which is mounted on top of the
Spin Station cover. The ULPA filter has two replaceable filter
cartridges. Air flow is adjusted via a rheostat to maintain a positive
air pressure within the Spin Station. The Spin Station filter uses an
ultra pure air or ULPA filter fan which has a 110 VAC power source
that is independent from the cleaner’s power source. Also, the
cleaner’s EMO circuit will power off the ULPA filter.
C
WARNING!:
To prevent clean room and cleaner contamination, the ULPA filter, if
installed,
must
remain operational at all times.
Summary of Contents for Synergy Integra
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